Workpiece vacuum chuck head
A workpiece vacuum chuck head, which serves to vacuum-chuck a light, minute workpiece and to release and place the vacuum-chucked workpiece on a workpiece placement surface, includes a base section, a workpiece vacuum chuck section, and a follower mechanism section for connecting together the base section and the workpiece vacuum chuck section. These sections form an integral structure. The base section has an attachment surface for attaching the workpiece vacuum chuck head to a head drive mechanism. The workpiece vacuum chuck section has a workpiece vacuum chuck surface and a negative-pressure chamber, which opens at the workpiece vacuum chuck surface via a suction hole. The follower mechanism section has a structure that is easily elastically deformable, and is appropriately deformed in a three-dimensional space so as to cause the workpiece vacuum chuck surface to follow an inclination of the workpiece placement surface.
1. A workpiece vacuum chuck head used to vacuum-chuck a light, minute workpiece and to release and place the vacuum-chucked workpiece on a workpiece placement surface, comprising:
a base section;
a workpiece vacuum chuck section; and
a lower mechanism section for connecting together the base section and the workpiece vacuum chuck section; wherein:
the base section, the workpiece vacuum chuck section, and the follower mechanism section are in the form of an integral structure of a spring-tempered metal;
the base section has an attachment surface for attaching the workpiece vacuum chuck head to a head drive mechanism;
the workpiece vacuum chuck section has a workpiece vacuum chuck surface for vacuum-chucking the workpiece, and a negative-pressure chamber provided within the workpiece vacuum chuck section and opening at the workpiece vacuum chuck surface via a suction hole to hold the workpiece on the workpiece vacuum chuck surface; and
the follower mechanism section has a structure that is easily elastically deformable in three dimensions, so as to cause the workpiece vacuum chuck surface to follow an inclination of the workpiece placement surface.
2. A workpiece vacuum chuck head according to claim 1 , wherein:
a workpiece pusher is accommodated in the negative-pressure chamber, and
the workpiece pusher has a pin portion which is inserted into the suction hole and which projects beyond and retracts behind the workpiece vacuum chuck surface.
3. A workpiece vacuum chuck head according to claim 1 , wherein:
the follower mechanism section comprises a plurality of curved spring legs, and
the plurality of curved spring legs connect the base section and the workpiece vacuum chuck section at a plurality of corresponding positions and allow the workpiece vacuum chuck surface to be uniformly displaced upon subjection to an external force of any direction that acts on the workpiece vacuum chuck surface.
4. A workpiece vacuum chuck head according to claim 3 , wherein:
the base section and the workpiece vacuum chuck section each have a shape of a rectangular quadrilateral as viewed in plane, and
the plurality of curved spring legs connect four corner portions of the base section and corresponding four corner portions of the workpiece vacuum chuck section, respectively.
5. A vacuum chuck head according to claim 1 , wherein the workpiece vacuum chuck surface is a surface of the integral structure.
6. A vacuum chuck head according to claim 5 , wherein the workpiece vacuum chuck surface is planar.
7. A vacuum chuck head according to claim 1 , wherein the workpiece vacuum chuck section is a rectangular quadrilateral block, wherein the workpiece vacuum chuck surface is one surface of the rectangular quadrilateral block.
8. A vacuum chuck head according to claim 1 , wherein the workpiece vacuum chuck section follows the inclination of the workpiece placement surface by becoming parallel with the workpiece placement surface.