Method of forming magnetic memory device
There are provided a magnetic memory device and a method of forming the magnetic memory device. The method of forming the magnetic memory device includes sequentially forming a first magnetic conductor, a tunnel barrier layer, and a second magnetic conductor on a substrate, forming a mask pattern on the second magnetic conductor, performing a primary etching of the second magnetic conductor by using the mask pattern as an etching mask, forming at least one spacer on sidewalls of the second magnetic conductor formed by the primary etching, and performing a secondary etching of the first magnetic conductor by using the mask pattern and the at least one spacers as an etching mask.
1. A method of forming a magnetic memory device, comprising:
sequentially forming a first magnetic conductor, a tunnel barrier layer, and a second magnetic conductor on a substrate;
forming a mask pattern on the second magnetic conductor;
performing a primary etching of the second magnetic conductor by using the mask pattern as an etching mask;
forming at least one spacer on a sidewall of the second magnetic conductor formed by the primary etching; and
performing a secondary etching of the first magnetic conductor by using the mask pattern and the at least one spacer as an etching mask,
wherein the first magnetic conductor includes a pinning layer and a pinned layer that are laminated, the pinned layer being formed between the pinning layer and the tunnel barrier layer,
wherein a portion of the pinned layer and the tunnel barrier layer are etched during the primary etching,
wherein the at least one spacer is formed on a sidewall of the second magnetic conductor, a sidewall of the tunnel barrier layer, and a sidewall of the pinned layer formed by the primary etching, and
wherein a bottom of the at least one spacer is higher than a bottom of the pinned layer and lower than a top of the pinned layer.
2. The method as set forth in claim 1 , wherein the pinned layer includes a first ferromagnetic layer and a second ferromagnetic layer, and the first magnetic conductor further includes a nonmagnetic layer interposed between the first ferromagnetic layer and the second ferromagnetic layer, and wherein a portion of the second ferromagnetic layer, the second magnetic conductor, and the tunnel barrier layer are etched by the primary etching.
3. The method as set forth in claim 2 , wherein the at least one spacer is formed on a sidewall of the tunnel barrier layer, a sidewall of the second magnetic conductor, and a portion of at least one sidewall of the second ferromagnetic layer, which are formed by the primary etching.
4. The method as set forth in claim 1 , wherein the first magnetic conductor includes a plurality of layers, wherein at least one of the plurality of layers includes a precious metal, and wherein the at least one layer including precious metals is not exposed before the secondary etching.
5. The method as set forth in claim 1 , wherein the at least one spacer includes a plurality of layers.
6. The method as set forth in claim 1 , wherein a portion of the pinned layer exposed from the at least one spacer is etched during the secondary etching.
7. A method of forming a magnetic memory device, comprising:
sequentially forming a first magnetic conductor, a tunnel barrier layer, and a second magnetic conductor on a substrate;
forming a mask pattern on the second magnetic conductor;
performing a primary etching of the second magnetic conductor by using the mask pattern as an etching mask;
forming at least one spacer on a sidewall of the second magnetic conductor formed by the primary etching; and
performing a secondary etching of the first magnetic conductor by using the mask pattern and the at least one spacer as an etching mask,
wherein a portion of the tunnel barrier layer is etched during the primary etching,
wherein a portion of the tunnel barrier layer exposed from the at least one spacer is etched during the secondary etching, and
wherein a bottom of the at least one spacer is lower than a top of the tunnel barrier layer and higher than a bottom of the tunnel barrier layer.
8. The method as set forth in claim 7 , wherein the at least one spacer is formed on a sidewall of the second magnetic conductor and a sidewall of the portion of the tunnel barrier layer formed by the primary etching.
9. The method as set forth in claim 7 , wherein the pinned layer includes a first ferromagnetic layer and a second ferromagnetic layer, and the first magnetic conductor further includes a nonmagnetic layer interposed between the first ferromagnetic layer and the second ferromagnetic layer.