Piezoelectric frames and piezoelectric devices comprising same
Piezoelectric frames are disclosed that include a tuning-fork type piezoelectric vibrating portion having a pair of vibrating arms extending from a base portion in a first direction (Y-direction). The vibrating arms have a first width W 1 . A respective excitation electrode is formed on each vibrating arm. Supporting arms extend from the base portion in the first direction, outboard of respective vibrating arms. The supporting arms have a second width W 2 . A respective connecting arm extends from each supporting arm in a second direction that crosses the first direction. An outer frame connects to the connecting arms, has a side extending in the first direction with a third width W 3 , and has another side extending in the second direction with a fourth width W 4 . The second width W 2 is 1.4 times smaller than the first width W 1.
1. A piezoelectric frame, comprising:
a tuning-fork type piezoelectric vibrating portion including a base portion, a pair of vibrating arms extending in a first direction from the base portion, and an excitation electrode formed on the vibrating arms, each vibrating arm having a first width (W 1 );
outboard of each vibrating arm, a respective supporting arm extending from the base portion in the first direction, each supporting arm having a second width (W 2 );
a respective connecting arm extending from each supporting arm in a second direction that crosses the first direction; and
an outer frame portion connected to the connecting arms and surrounding the tuning-fork type piezoelectric vibrating piece, supporting arms, and connecting arms, the outer frame portion including first side members extending parallel to each other in the first direction and second side members extending parallel to each other in the second direction and being coupled to the first side members to form the outer frame portion, the first side members having a third width (W 3 ) and the second side members having a fourth width (W 4 ), wherein W 2 ≦(1.4×W 1 ).
2. The piezoelectric frame of claim 1 , wherein W 3 ≧(1.1×W 1 ).
3. A piezoelectric device, comprising;
a piezoelectric frame as recited in claim 2 ;
a lid covering the piezoelectric frame; and
a package base supporting the piezoelectric frame.
4. The piezoelectric device of claim 3 , wherein:
the lid and package base are made of a material comprising glass containing metal ions;
the first side members and second side members each comprise a surficial metal film on respective surfaces thereof facing the lid and package base; and
the lid and package base are bonded to the metal films as a result of anodic bonding.
5. The piezoelectric device of claim 3 , wherein:
the lid and base are each made of a piezoelectric material; and
the outer frame portion is bonded to the lid and to the package base as a result of siloxane bonding.
6. A piezoelectric device, comprising;
a piezoelectric frame as recited in claim 1 ;
a lid covering the piezoelectric frame; and
a package base supporting the piezoelectric frame.
7. The piezoelectric device of claim 6 , wherein:
the lid and package base are made of a material comprising glass containing metal ions;
the first side members and second side members each comprise a surficial metal film on respective surfaces thereof facing the lid and package base; and
the lid and package base are bonded to the metal films as a result of anodic bonding.
8. The piezoelectric device of claim 6 , wherein:
the lid and base are each made of a piezoelectric material; and
the outer frame portion is bonded to the lid and to the package base as a result of siloxane bonding.
9. A piezoelectric frame, comprising:
a tuning-fork type piezoelectric vibrating portion including a base portion, a pair of vibrating arms extending in a first direction from the base portion, and an excitation electrode formed on the vibrating arms, each vibrating arm having a first width (W 1 );
outboard of each vibrating arm, a respective supporting arm extending from the base portion in the first direction, each supporting arm having a second width (W 2 );
a respective connecting arm extending from each supporting arm in a second direction that crosses the first direction; and
an outer frame portion connected to the connecting arms and surrounding the tuning-fork type piezoelectric vibrating piece, supporting arms, and connecting arms, the outer frame portion including first side members extending parallel to each other in the first direction and second side members extending parallel to each other in the second direction and being coupled to the first side members to form the outer frame portion, the first side members having a third width (W 3 ) and the second side members having a fourth width (W 4 ), wherein W 3 ≧(1.1×W 4 ).
10. The piezoelectric frame of claim 9 , wherein W 4 ≧W 1 .
11. A piezoelectric device comprising;
a piezoelectric frame as recited in claim 10 ;
a lid covering the piezoelectric frame; and
a package base supporting the piezoelectric frame.
12. The piezoelectric device of claim 11 , wherein:
the lid and package base are made of a material comprising glass containing metal ions;
the first side members and second side members each comprise a surficial metal film on respective surfaces thereof facing the lid and package base; and
the lid and package base are bonded to the metal films as a result of anodic bonding.
13. The piezoelectric frame of claim 9 , wherein W 2 ≦(1.4×W 1 ).
14. A piezoelectric device, comprising;
a piezoelectric frame as recited in claim 13 ;
a lid covering the piezoelectric frame; and
a package base supporting the piezoelectric frame.
15. The piezoelectric device of claim 9 , wherein W 2 ≦(1.4×W 1 ).
16. A piezoelectric device, comprising;
a piezoelectric frame as recited in claim 15 ;
a lid covering the piezoelectric frame; and
a package base supporting the piezoelectric frame.
17. The piezoelectric device of claim 16 , wherein:
the lid and package base are made of a material comprising glass containing metal ions;
the first side members and second side members each comprise a surficial metal film on respective surfaces thereof facing the lid and package base; and
the lid and package base are bonded to the metal films as a result of anodic bonding.
18. A piezoelectric device, comprising;
a piezoelectric frame as recited in claim 9 ;
a lid covering the piezoelectric frame; and
a package base supporting the piezoelectric frame.
19. The piezoelectric device of claim 18 , wherein:
the lid and package base are made of a material comprising glass containing metal ions;
the first side members and second side members each comprise a surficial metal film on respective surfaces thereof facing the lid and package base; and
the lid and package base are bonded to the metal films as a result of anodic bonding.
20. The piezoelectric device of claim 18 , wherein:
the lid and base are each made of a piezoelectric material; and
the outer frame portion is bonded to the lid and to the package base as a result of siloxane bonding.