Polishing pad
The polishing pad includes a polishing surface, on which is formed with a plurality of first grooves and a plurality of second grooves, wherein the characteristic of the polishing pad is in that: the first grooves are connected to the second grooves, the width of first grooves are larger than that of the second grooves, the depth of first grooves are larger than that of the second grooves, the density of first grooves are larger than that of the second grooves, and the first grooves and the second grooves are uniformly distributed over the polishing surface respectively. Therefore when the polishing step is performed using the polishing pad, smaller scraps produced after polishing or smaller polishing particles in the slurry or more turbid slurry can flow out of the polishing pad via the second groove, and larger scraps or particles can flow out of the polishing pad via the first groove.
1. A polishing pad, said polishing pad including a polishing surface, a plurality of first grooves and a plurality of second grooves being formed on said polishing surface, wherein characteristic of said polishing pad being in that:
said first grooves are connected to said second grooves, one end of each of said first grooves and one end of each of said second grooves are connected to periphery of said polishing pad respectively, each of said first grooves has a uniform width and a uniform depth, each of said second grooves has a uniform width and a uniform depth, width of each of said first grooves being larger than that of each of said second grooves, depth of each of said first grooves being larger than that of each of said second grooves, density of each of said first grooves distributed over said polishing surface being smaller than that of each of said second grooves, and said first grooves and said second grooves being uniformly distributed over said polishing surface respectively.
2. The polishing pad according to claim 1 , wherein each of said first grooves is disposed on said polishing pad with center of circle of said polishing pad as center in curved radiation toward periphery of said polishing pad.
3. The polishing pad according to claim 1 , wherein each of said first grooves is disposed on said polishing pad with center of circle of said polishing pad as center in direct line radiation toward periphery of said polishing pad.
4. The polishing pad according to claim 1 , wherein depth of each of said second groove is about 0.1 mm˜1 mm.
5. The polishing pad according to claim 1 , wherein depth of each of said first groove is about 0.2 mm˜1.5 mm.
6. The polishing pad according to claim 1 , wherein said polishing pad further includes a connecting surface for being connected to polishing surface of another polishing pad.
7. A polishing pad, said polishing pad including a polishing surface, a plurality of first grooves and a plurality of second grooves in grid pattern being formed on said polishing surface, wherein characteristic of said polishing pad being in that:
said first grooves and said second grooves in grid pattern are connected to each other, one end of each of said first grooves and two ends of each of said second grooves in grid pattern are connected to periphery of said polishing pad respectively, each of said first grooves has a uniform width and a uniform depth, each of said second grooves in grid pattern has a uniform width and a uniform depth, width of each of said first grooves being larger than that of said second grooves in grid pattern, depth of each of said first groove being larger than that of said second grooves in grid pattern, density of each of said first groove distributed over said polishing surface being smaller than that of said second grooves in grid pattern, and said first grooves and said second grooves in grid pattern being uniformly distributed over said polishing surface respectively.
8. The polishing pad according to claim 7 , wherein each of said first grooves is disposed on said polishing pad with center of circle of said polishing pad as center in curved radiation toward periphery of said polishing pad.
9. The polishing pad according to claim 7 , wherein each of said first grooves is disposed on said polishing pad with center of circle of said polishing pad as center in direct line radiation toward periphery of said polishing pad.
10. The polishing pad according to claim 7 , wherein said first grooves are disposed on said polishing pad in grid pattern and two ends of each of said first grooves are connected to periphery of said polishing pad.
11. The polishing pad according to claim 7 , wherein depth of said second grooves in grid pattern are about 0.4 mm˜0.7 mm.
12. The polishing pad according to claim 7 , wherein depth of each of said first grooves is about 0.5 mm˜1.2 mm.
13. The polishing pad according to claim 7 , wherein said polishing pad further includes a connecting surface for being connected to polishing surface of another polishing pad.