Apparatus for manufacturing bonded substrate
The present invention provide an apparatus for manufacturing a bonded substrate that suppresses a defect in the bonded substrate. When the pressure in a vacuum chamber is at the atmospheric level, upper and lower chuck units respectively attract substrates through vacuum. When the vacuum chamber is depressurized, each chuck unit electrostatically attracts the associated substrate. During the depressurization of the vacuum chamber, the pressure for attracting each substrate to the associated chuck unit is controlled to be equal to the pressure in the vacuum chamber. This prevents each substrate from falling from or moving relative to the associated chuck unit. The first and second substrates are thus bonded together as accurately aligned.
1. A method for operating a bonded substrate manufacturing apparatus for bonding a first substrate and a second substrate together, the apparatus including a pre-alignment device including an image pickup device, a pressing device that aligns and bonds the first and second substrates in an evacuated treatment chamber, and a transport device that transports the first and second substrates in a transport direction to the pressing device, the method comprising:
returning, by the transport device, another first and second substrates, which have been aligned by the pressing device in a previous operation cycle, from the pressing device to the pre-alignment device in a direction opposite to the transport direction;
acquiring, by the image pickup device of the pre-alignment device, an image of each of said another first and second substrates returned to the pre-alignment device and storing the image as a reference image by the pre-alignment device;
acquiring, by the image pickup device of the pre-alignment device, an image of each of the first and second substrates to be bonded together in the current operation cycle;
comparing, by the pre-alignment device, the acquired image of each of the first and second substrates with the respective reference image to measure a misalignment amount for each of the first and second substrates; and
correcting position of each of the first and second substrates in accordance with the measured misalignment amount for each of the first and second substrates before transporting the first and second substrates from the pre-alignment device into the treatment chamber of the pressing device.
2. The method according to claim 1 , wherein the misalignment amount includes a misalignment amount in a rotation direction about an axis vertical to a horizontal plane including the transport direction.
3. The method according to claim 1 , wherein the correcting position of each of the first and second substrates is executed on a stage of the pre-alignment device.
4. The method according to claim 1 , wherein the transport device corrects the misalignment amount of each of the first and second substrates while transporting the first and second substrates.
5. The method according to claim 1 , wherein: providing, by the pre-alignment device, the transport device with the misalignment amount; and
transporting, by the transport device, the first and second substrates in the transport direction by a distance according to the misalignment amount.