Phase change memory devices having dual lower electrodes and methods of fabricating the same
A semiconductor device includes a semiconductor substrate and a lower interlayer insulating layer disposed on the substrate. An opening passing through the lower interlayer insulating layer and exposing the substrate is included. A buried insulating pattern is disposed in the opening. First and second conductive layer patterns are sequentially stacked to surround the sidewall and bottom of the buried insulating pattern. A phase change material pattern is included, which is disposed on the lower interlayer insulating layer in contact with a top surface of the second conductive layer pattern, and spaced apart from the first conductive layer pattern. An upper interlayer insulating layer covering the lower interlayer insulating layer and the phase change material pattern is included. A conductive plug is included, which passes through the upper interlayer insulating layer and is electrically connected to the phase change material pattern. A method of fabricating the semiconductor device is also provided.
1. A method of fabricating a semiconductor device, comprising:
forming an interlayer insulating layer on a semiconductor substrate;
forming an opening within the interlayer insulating layer wherein the opening exposes the semiconductor substrate;
sequentially forming first and second conductive layer patterns to cover a bottom surface and a sidewall of the opening;
forming a buried insulating pattern within the opening and on the first and second conductive layer patterns;
forming a phase change material pattern on the first and second conductive layer patterns, wherein the phase change material pattern contacts a top surface of the second conductive layer pattern and is spaced apart from a top surface of the first conductive layer pattern;
forming a buffer pattern between the top surface of the first conductive layer pattern and a bottom surface of the phase change material pattern, wherein the buffer pattern comprises an oxide containing at least one element constituting the first conductive layer pattern; and
forming a conductive plug electrically connected to the phase change material pattern,
wherein the buffer pattern comprises titanium oxide, tantalum oxide or a combination thereof.
2. The method according to claim 1 , wherein the first and second conductive layer patterns conformally cover the bottom surface and sidewall of the opening.
3. The method according to claim 1 , wherein a top surface of the buffer pattern is substantially coplanar with the top surface of the second conductive layer pattern.
4. The method according to claim 1 , wherein forming the buffer pattern is performed by thermally treating or plasma-treating the first conductive layer pattern at a temperature ranging from about 100° C. to about 500° C.
5. The method according to claim 1 , wherein the first conductive layer pattern comprises a conductive material that oxidizes more readily than a material of the second conducive layer pattern.
6. The method according to claim 1 , wherein the first conductive layer pattern comprises titanium, titanium nitride, tantalum layer or a combination thereof and the second conductive layer pattern comprises titanium aluminum nitride.
7. A method of fabricating a semiconductor device, comprising:
forming an interlayer insulating layer on a semiconductor substrate;
forming an opening within the interlayer insulating layer wherein the opening exposes the semiconductor substrate;
sequentially forming first and second conductive layer patterns to cover a bottom surface and a sidewall of the opening;
forming a buried insulating pattern within the opening and on the first and second conductive layer patterns;
forming a phase change material pattern on the first and second conductive layer patterns, wherein the phase change material pattern contacts a top surface of the second conductive layer pattern and is spaced apart from a top surface of the first conductive layer pattern;
forming a buffer pattern between the top surface of the first conductive layer pattern and a bottom surface of the phase change material pattern, wherein the buffer pattern comprises an oxide containing at least one element constituting the first conductive layer pattern; and
forming a conductive plug electrically connected to the phase change material pattern,
wherein the top surface of the second conductive layer pattern is lower than a top surface of the buffer pattern.
8. A method of fabricating a semiconductor device, comprising:
forming an interlayer insulating layer on a semiconductor substrate;
forming an opening in the interlayer insulating layer;
forming a first conductive layer pattern on a bottom surface and sidewalls of the opening;
forming a second conductive layer pattern on the first conductive layer pattern;
forming a buried insulating pattern on the second conductive layer pattern;
forming a metal oxide pattern on the first conductive layer pattern; and
forming a phase change material pattern on the metal oxide pattern, the second conductive layer pattern, and the buried insulating pattern.
9. The method of claim 8 , wherein the forming the metal oxide pattern on the first conductive layer pattern comprises thermally treating a top portion of the first conductive layer pattern.
10. The method according to claim 9 , wherein thermally treating the top portion of the first conductive layer pattern includes oxidizing the top portion of the first conductive layer pattern.
11. The method according to claim 8 , wherein the first conductive layer pattern and the metal oxide include the same metal.