Solid-state imaging device and solid-state imaging device manufacturing method
A solid-state imaging device 1 includes: a semiconductor substrate 11 on which pixels are placed like a matrix; and each of the pixels having a photoelectric conversion element 13 and a color filter layer 21 which is formed on the photoelectric conversion element 13 . The solid-state imaging device 1 includes resin parts 20 which are formed at the boundaries of these photoelectric conversion devices 13 which are adjacent to each other, each of the resin parts 20 having an upward convex shape. Each color filter layer 21 of the device is formed so that the color filter layer covers the area ranging from the summit of a resin part to the summit of an adjacent resin part, and each color filter layer 21 is thinner in the peripheral part than in the center part around the summit.
1. A solid-state imaging device comprising:
a semiconductor substrate on which a plurality of photoelectric conversion elements are formed;
a first transparent planarization film formed above said semiconductor substrate and above said photoelectric conversion elements;
a surface protection film formed above said semiconductor substrate and above a boundary area between said photoelectric conversion elements adjacent to each other;
a convex part formed on said surface protection film and above the boundary area; and
a color filter formed above said first transparent planarization film and said convex part and above said photoelectric conversion elements,
wherein said color filter has a concave top surface.
2. The solid-state imaging device according to claim 1 ,
wherein said surface protection film is a SiON film.
3. The solid-state imaging device according to claim 1 ,
wherein said first transparent planarization film is mainly made of phenolic resin.
4. The solid-state imaging device according to claim 1 ,
wherein said color filter is thinner in a peripheral part than in a center part.
5. The solid-state imaging device according to claim 1 ,
wherein said convex part has a lower refractive index than said color filter.
6. The solid-state imaging device according to claim 1 ,
wherein said color filter has a higher refractive index than said first transparent planarization film.
7. The solid-state imaging device according to claim 1 , further comprising
a second transparent planarization film formed on said color filter,
wherein said second transparent planarization film has a lower refractive index than said color filter.
8. The solid-state imaging device according to claim 7 , further comprising
a microlens formed on said second transparent planarization film,
wherein said microlens has a higher refractive index than said second transparent planarization film.
9. The solid-state imaging device according to claim 7 , further comprising
a microlens formed on said second transparent planarization film,
wherein said microlens has a higher refractive index than said color filter.
10. The solid-state imaging device according to claim 1 ,
wherein said convex part is formed in a matrix shape above the boundary area.
11. The solid-state imaging device according to claim 1 ,
wherein said convex part is mainly made of resin.
12. The solid-state imaging device according to claim 1 ,
wherein said color filter has an edge part located on a summit of said convex part.