Method of depositing protective structures
View Patent ↗A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein the manufacturing the protection strip includes a first phase of activating a surface area portion of the substrate, and a second phase of electron beam assisted deposition of the protective strip on the activated surface area portion from the gas phase.
1. A process of preparing a lamella from a substrate, the process comprising:
manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate; and
preparing the lamella,
wherein the manufacturing the protection strip comprises a first phase of activating a surface area portion of the substrate, and a second phase of particle beam assisted deposition of the protective strip on the activated surface area portion from the gas phase.
2. The process of claim 1 , wherein in the second phase, the deposition occurs from a precursor gas, which gas dissociates in the surface area portion activated in the first phase, and does not dissociate in a portion not activated in the first phase.
3. The process of claim 1 , wherein the first phase and the second phase are made to occur simultaneously, alternatingly or with a waiting interval in between.
4. The process of claim 1 , wherein the lamella is prepared using an ion beam.
5. The process of claim 4 , wherein the ion beam is a focussed ion beam (FIB).
6. The process of claim 4 , wherein the ion beam is a Ga ion beam.
7. The process of claim 4 , wherein the preparing is made by ion beam milling.
8. The process of claim 4 , wherein the protection strip is manufactured in a thickness and from a material, such that the preparation ion beam electron causes no microscopically detectable damage to the edge portion of the lamella.
9. The process of claim 4 , wherein the thickness of the protective strip is made larger than a mean penetration depth of the preparation ion beam in the material of the protection strip.
10. The process of claim 9 , wherein the thickness of the protective strip is made at least 1.5 times as large as the mean penetration depth of the preparation ion beam in the material of the protection strip.
11. The process of claim 4 , wherein the thickness of the protective strip is selected at least twice as large as the mean penetration depth of the preparation ion beam in the material of the protection strip.
12. The process of claim 1 , wherein the activating is at least partially thermal.
13. The process of claim 12 , wherein no ion beam is used in the deposition.
14. The process of claim 1 , wherein the protection strip is manufactured using at least one of iron, cobalt, chromium, molybdenum, tungsten, gold and platinum.
15. A lamella for TEM-analysis, comprising:
a plate made of a substrate material, wherein the thickness of the plate is smaller than a first limit value, at which a difference of the base 10 logarithms of the incident analysis electron beam intensity and the minimally transmitted analysis electron beam intensity is 2; and by
a layer arranged at an edge portion of the plate, the layer consisting essentially of a metal, carbon and oxygen.
16. The lamella of claim 15 , wherein the edge layer comprises less carbon, by mass, than metal.
17. The lamella of claim 15 , wherein the edge layer comprises at least 40% metal atoms.
18. The lamella of claim 17 , wherein the edge layer comprises at least 60% metal atoms.
19. The lamella of claims 15 , wherein the thickness of the lamella is smaller than a second limit value, at which a difference of the base 10 logarithms of the incident analysis electron beam intensity and the minimally transmitted analysis electron beam intensity is 1.