Semiconductor package with a metal post
Disclosed are a semiconductor package and a manufacturing method thereof. The semiconductor package can include a semiconductor substrate, having one surface on which a conductive pad is formed; an insulating layer, being formed on one surface of the semiconductor substrate; a metal post, penetrating through the conductive pad, the semiconductor substrate, and the insulating layer; and an outer-layer circuit, being electrically connected to the metal post. With the present invention, it can become unnecessary to form an additional via for electrically connecting both surfaces of the semiconductor substrate, thereby simplifying the manufacturing process, reducing the manufacturing cost, and improving the coupling reliability.
1. A semiconductor package comprising:
a semiconductor substrate, of which one surface is formed with a conductive pad;
an insulating layer formed on the one surface of the semiconductor substrate;
a metal post penetrating through the conductive pad, the semiconductor substrate and the insulating layer;
a seed layer disposed between the conductive pad and the metal post;
outer-layer circuits formed on another surface of the semiconductor substrate and an outer surface of the insulating layer, respectively, the outer-layer circuits being electrically connected to the metal post; and
solder bumps formed on the outer-layer circuits, respectively, wherein:
the seed layer is in direct contact with the conductive pad, and
a side surface of the metal post is in direct contact with the seed layer such that the metal post is electrically connected to the conductive pad.