Coating and developing apparatus, coating and developing method, and storage medium
A coating and developing apparatus has: a treatment block-including a water repellent module performing water repellent treatment on a substrate, a coating module, and a developing module; a substrate side-surface portion water repellent module for performing water repellent treatment on a side surface of a substrate; and a control unit controlling operations of the modules to execute steps of performing water repellent treatment at least on a side surface portion of a substrate and performing a first resist coating on an entire surface of the substrate; performing a first development after a first liquid-immersion exposure is performed; performing a second resist coating on the entire surface, and performing a second development after a second liquid-immersion exposure is performed, and further to execute a step of performing water repellent treatment on the side surface portion of the substrate after the first development and before the second exposure is performed.
1. A coating and developing method of forming a resist pattern a plurality of times in succession on a substrate, comprising the steps of:
performing water repellent treatment at least on a side surface portion of a substrate;
performing a first resist coating of applying a resist on an entire surface of the substrate;
performing a first development of supplying a developing solution to the substrate on which a first liquid-immersion exposure has been further performed after the water repellent treatment and the first resist coating;
performing a second resist coating of applying a resist to the entire surface of the substrate after the first development;
performing a second development of supplying a developing solution to the substrate on which a second liquid-immersion exposure has been further performed after the second resist coating; and
performing water repellent treatment on the side surface portion of the substrate after the first development and before the second liquid-immersion exposure is performed.
2. The coating and developing method as set forth in claim 1 , further comprising the steps of:
mounting, on a heating plate, the substrate after the first development and before the second resist coating; and
heating the substrate,
wherein said step of performing water repellent treatment on a side surface portion of a substrate comprises a step of supplying, to the side surface portion of the substrate while the substrate is being heated, a gas for performing water repellent treatment on the side surface portion.
3. The coating and developing method as set forth in claim 1 , further comprising the steps of:
mounting, on a heating plate, the substrate after the second resist coating and before the second liquid-immersion exposure is performed; and
heating the substrate,
wherein said step of performing water repellent treatment on a side surface portion of a substrate comprises a step of supplying, to the side surface portion of the substrate while the substrate is being heated, a gas for performing water repellent treatment on the side surface portion.
4. The coating and developing method as set forth in claim 1 , further comprising the steps of:
mounting, on a mounting table, the substrate after the second resist coating and before the second liquid-immersion exposure is performed; and
supplying a cleaning solution to the substrate mounted on the mounting table to clean the substrate,
wherein said step of performing water repellent treatment on a side surface portion of a substrate comprises a step of supplying, to the side surface portion of the substrate mounted on the mounting table, a chemical for performing water repellent treatment on the side surface portion.