System and method for a charged particle beam
System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.
1. A charged particle beam apparatus, comprising:
a charged particle source for generating a primary charged particle beam;
at least one condenser lens for condensing the primary charged particle beam;
a compound objective lens for focusing the primary charged particle beam to a specimen on a stage system, the compound objective lens comprising:
a first magnetic lens;
a second magnetic lens, wherein a shared pole piece is configured for both the first magnetic lens and the second magnetic lens; and
an electrostatic lens; and
a detection system for detecting charged particles or X-ray emanated from the specimen.
2. The charged particle beam apparatus of claim 1 , wherein the first magnetic lens comprises an upper pole piece and a first excitation coil with the shared pole piece and the upper pole piece.
3. The charged particle beam apparatus of claim 2 , wherein the second magnetic lens comprises a lower pole piece and a second excitation coil within the shared pole piece and the lower pole piece.
4. The charged particle beam apparatus of claim 3 , wherein the shared pole piece is isolated from the upper pole piece.
5. The charged particle beam apparatus of claim 4 , wherein the shared pole piece is isolated from the lower pole piece.
6. The charged particle beam apparatus of claim 5 , wherein the electrostatic lens comprises the upper pole piece, the shared pole piece, and the specimen.
7. The charged particle beam apparatus of claim 6 , wherein the first magnetic lens is conical.
8. The charged particle beam apparatus of claim 7 , wherein the second magnetic lens is an immersion lens.
9. The charged particle beam apparatus of claim 3 , wherein the lower pole piece is isolated from the second magnetic lens.
10. The charged particle beam apparatus of claim 5 , wherein the lower pole piece is isolated from the second magnetic lens.
11. The charged particle beam apparatus of claim 1 , wherein the shared pole piece is electrically isolated from the first magnetic lens and the second magnetic lens.
12. A scanning electron microscope, comprising:
an electron source for generating a primary electron beam;
at least one condenser lens for condensing the primary electron beam;
a compound objective lens for focusing the primary electron beam to a specimen on a stage system, the compound objective lens comprising:
a conical magnetic lens;
an immersion magnetic lens, wherein a shared pole piece is configured for both the conical magnetic lens and the immersion magnetic lens; and
an electrostatic lens;
a deflection system for deflecting the primary electron beam over a surface of the specimen to form a scanning pattern; and
a detection system for detecting secondary electrons or X-ray emanated from the specimen.
13. The scanning electron microscope of claim 12 , wherein the shared pole piece is electrically isolated from the conical magnetic lens and the immersion magnetic lens.
14. The scanning electron microscope of claim 13 , wherein the conical magnetic lens comprises an upper pole piece and a first excitation coil with the shared pole piece and the upper pole piece.
15. The scanning electron microscope of claim 14 , wherein the immersion magnetic lens comprises a lower pole piece and a second excitation coil within the shared pole piece and the lower pole piece.
16. The scanning electron microscope of claim 15 , wherein the shared pole piece is isolated from the upper pole piece and the lower pole piece.
17. The scanning electron microscope of claim 16 , wherein the lower pole piece is isolated from the immersion magnetic lens.
18. The scanning electron microscope of claim 15 , wherein the electrostatic lens comprises the upper pole piece, the shared pole piece, and the specimen.
19. The scanning electron microscope of claim 12 , further comprising an ExB filter for aligning or bending the secondary electrons to the detection system.
20. An E-beam inspection apparatus, comprising:
an electron source for generating a primary electron beam;
at least one condenser lens for condensing the primary electron beam;
a compound objective lens for focusing the primary electron beam to a specimen on a stage system, the compound objective lens comprising:
a conical magnetic lens including an upper pole piece, a shared pole piece, and a first excitation coil with the shared pole piece and the upper pole piece;
an immersion magnetic lens including a lower pole piece, the shared pole piece and a second excitation coil within the shared pole piece and the lower pole piece; and
an electrostatic lens configured by the upper pole piece, the shared pole piece, and the specimen;
a deflection system for deflecting the primary electron beam over a surface of the specimen to form a scanning pattern;
a detection system for detecting secondary electrons or X-ray emanated from the specimen; and
an ExB filter for aligning or bending the secondary electrons to the detection system.