Semiconductor device and method of manufacturing the same
A method of manufacturing a semiconductor device that comprises the steps of: removing a second insulating film on a contact region of a first conductor; forming a second conductive film on the second insulating film; removing the second conductive film on the contact region of the first conductor to make the second conductive film into a second conductor; forming an interlayer insulating film (a third insulating film) covering the second conductor; forming a first hole in the interlayer insulating film on the contact region; and forming a conductive plug, which is electrically connected with the contact region, in the first hole.
1. A semiconductor device comprising:
a laminated structure body, which integrally has on a first region of a semiconductor substrate: a first portion where a first insulating film, a first conductor, a second insulating film, and a second conductor sequentially remain; a second portion where said first conductor and said second conductor are laminated on said semiconductor substrate; and a third portion where neither said second insulating film nor said second conductor remains on said semiconductor substrate; and
a third insulating film, which covers said laminated structure body and includes one or more holes where one or more contact regions of said first conductor of said laminated structure body are exposed at one or more parts of said third portion, wherein said second conductor has a first opening corresponding to said third portion, and
said second insulating film has a second opening that is larger than said first opening.
2. The semiconductor device according to claim 1 , wherein said first insulating film is a silicon oxide film.
3. The semiconductor device according to claim 1 , wherein said second insulating film is an ONO film.
4. The semiconductor device according to claim 1 , comprising:
a flash memory cell made up of a tunnel insulating film, a floating gate constructed from the same material as said first conductor, an intermediate insulating film constructed from the same material as said second insulating film, and a control gate constructed from the same material as said second conductor, which sequentially remain on a second region of said semiconductor substrate, and first and second source/drain regions remaining in said semiconductor substrate beside said floating gate.
5. The semiconductor device according to claim 1 , wherein
said first conductor is made up of a pad portion remaining in said contact region and a gate
portion connected to the pad portion,
third and fourth source/drain regions remain in said semiconductor substrate beside said gate portion, and
said first insulating film, said gate portion, and said third and fourth source/drain regions
constitute a transistor.
6. The semiconductor device according to claim 5 , wherein
said first opening remains in said second conductor on said contact region of said pad portion, a silicon oxide film including said second opening on said pad portion inside said first opening remains, and said hole remains inside said first and second openings.
7. The semiconductor device according to claim 1 , wherein said second conductor is in an electrically floating state.
8. The semiconductor device according to claim 1 , wherein further
a fourth insulating film remains between said first conductor and said second conductor in the second portion.
9. A semiconductor device comprising:
a laminated structure body, which integrally has on a first region of a semiconductor substrate: a first portion where a first insulating film, a first conductor, a second insulating film, and a second conductor sequentially remain; a second portion where said first conductor and said second insulating film are laminated on said semiconductor substrate; and a third portion where neither said second insulating film nor said second conductor remains on said semiconductor substrate; and
a third insulating film, which covers said laminated structure body and includes one or more holes where one or more contact regions of said first conductor of said laminated structure body are exposed at one or more parts of said third portion, wherein
said second insulating film has a first opening corresponding to said third portion, and
said second conductor has a second opening that is larger than said first opening.
10. The semiconductor device according to claim 9 , wherein said first conductor, said second insulating film, and said second conductor constitute a capacitor.
11. The semiconductor device according to claim 9 , wherein
two of said holes are formed at an interval, conductive plugs that are electrically connected with said contact regions remain in the each holes, and the two conductive plugs and said first conductor constitute a resistive element.