Semiconductor device having silicide layer completely occupied amorphous layer formed in the substrate and an interface junction of (111) silicon plane
A semiconductor device includes diffusion layers formed in a SOI layer under a side-wall, a channel formed between the diffusion layers, silicide layers sandwiching the diffusion layers wherein interface junctions between the diffusion layers and the silicide layers are ( 111 ) silicon planes.
1. A semiconductor device, comprising:
a silicon substrate having an active area defined by a field oxide layer formed thereon, wherein the silicon substrate has a first and a second amorphous layers in the active area and a first region between the first and the second amorphous layers in the active area, and wherein the first region acts as a channel;
a first silicide layer, which completely occupies the first amorphous layer;
a second silicide layer, which completely occupies the second amorphous layer;
a gate electrode, which is formed over the first region of the silicon substrate; and
a side wall, spacer which is formed next to the gate electrode, and which is formed on the first region and on one of the first and the second silicide layers,
wherein each interface junction between one of the first and the second silicide layers, which is located directly below the side wall, spacer and the silicon substrate located in the first region, includes a (111) silicon plane.
2. The semiconductor device as claimed in claim 1 , wherein the silicide layer includes cobalt.
3. The semiconductor device as claimed in claim 1 , wherein the silicide layer is a metal silicide layer and has a crystallographic structure that is a cubic system.