Gallium nitride substrate
A gallium nitride substrate comprising a primary surface, the primary surface being tilted at an angle in a range of 20 to 160 degrees with respect to a C-plane of the substrate, and the substrate having a fracture toughness of more than or equal to 1.36 MN/m 3/2 .
1. A gallium nitride substrate comprising a primary surface, the primary surface being tilted at an angle in a range of 20 to 160 degrees with respect to a C-plane of the substrate, and the substrate having a fracture toughness of more than or equal to 1.36 MN/m 3/2 , further comprising a cleaved surface that extends in a direction perpendicular to a [11-20] direction.
2. The gallium nitride substrate according to claim 1 , wherein the primary surface is tilted in a [1-100] direction of the substrate.
3. The gallium nitride substrate according to claim 2 , wherein the primary surface has a longitudinal direction being a [11-20] direction of the substrate and a transverse direction perpendicular to the [11-20] direction.
4. The gallium nitride substrate according to claim 2 , wherein the angle between the primary surface and the C-plane is in a range of 71 to 79 degrees.
5. A gallium nitride substrate comprising a primary surface, the primary surface being tilted at an angle in a range of 20 to 160 degrees with respect to a C-plane of the substrate, the substrate having a fracture toughness of more than or equal to 1.36 MN/m 3/2 , the primary surface having a longitudinal direction and a transverse direction, the longitudinal direction being a [11-20] direction of the substrate, and the transverse direction being perpendicular to the [11-20] direction further comprising a cleaved surface that extends in a direction perpendicular to a [11-20] direction.
6. The gallium nitride substrate according to claim 5 , wherein the angle between the primary surface and the C-plane is in a range of 71 to 79 degrees.
7. A gallium nitride substrate comprising a primary surface, the primary surface being tilted at an angle in a range of 71 to 79 degrees with respect to a C-plane of the substrate, the substrate having a fracture toughness of more than or equal to 1.36 MN/m 3/2 , further comprising a cleaved surface that extends in a direction perpendicular to a [11-20] direction.
8. A gallium nitride substrate comprising a primary surface and a cleaved surface that extends in a direction perpendicular to the [11-20] direction, the primary surface being tilted at an angle in a range of 20 to 160 degrees with respect to a C-plane of the substrate, the substrate having a fracture toughness of more than or equal to 1.36 MN/m 3/2 .
9. A gallium nitride substrate comprising a primary surface, the primary surface being tilted at an angle in a range of 71 to 79 degrees with respect to a C-plane of the substrate, and the substrate having a fracture toughness of more than or equal to 1.36 MN/m 3/2 , the primary surface having a longitudinal direction and a transverse direction, the longitudinal direction being a [11-20] direction of the substrate, and the transverse direction being perpendicular to the [11-20]direction, further comprising a cleaved surface that extends in a direction perpendicular to a [11-20] direction.