Method and apparatus for manufacturing trichlorosilane
An apparatus 1 for manufacturing trichlorosilane includes a decomposition furnace 2 into which polymers and hydrogen chloride are introduced, the decomposition furnace 2 includes: a heating device 11 which heats an interior of the decomposition furnace 2 ; a reaction chamber 4 which is formed in the decomposition furnace; a center tube 3 which is inserted in the reaction chamber 4 along a longitudinal direction of the reaction chamber and has a lower-end opening portion 3 a ; raw-material-supply pipes 5 and 6 which supplies the polymer and the hydrogen chloride to the reaction chamber 4 at an exterior of the center tube 3 ; and a gas-discharge pipe 7 which leads out reacted gas from the center tube 3 , the apparatus 1 further includes a fin 14 that leads the polymer and the hydrogen chloride to the lower-end opening portion 3 a of the center tube 3 so as to stir the polymer and the hydrogen chloride.
1. An apparatus for manufacturing trichlorosilane by decomposition reacting polymers with hydrogen chloride at a high temperature, the apparatus comprising:
a decomposition furnace into which the polymers including high-boiling chlorosilanes generated in a polycrystalline silicon manufacture process, a trichlorosilane manufacture process, or a conversion process and hydrogen chloride are introduced, the decomposition furnace comprising:
a heating device which heats an interior of the decomposition furnace;
a reaction chamber which is formed in the decomposition furnace;
a center tube which is provided in the reaction chamber along a longitudinal direction of the reaction chamber and has a lower-end opening portion opposed to an inner-bottom surface of the decomposition furnace;
a raw-material-supply pipe which supplies the polymer and the hydrogen chloride to an upper portion of the reaction chamber at an exterior of the center tube; and
a gas-discharge pipe which leads out reacted gas from an upper end portion of the center tube;
the apparatus further comprising a fin which is formed integrally with at least one of an outer peripheral surface of the center tube or an inner peripheral surface of the decomposition furnace, and which leads the polymer and the hydrogen chloride to the lower-end opening portion of the center tube so as to stir the polymer and the hydrogen chloride,
a pressurized-gas injection pipe which injects a pressurized gas into the decomposition furnace; and
a discharge pipe which discharges a fluid in the decomposition furnace purged by the pressurized gas.
2. An apparatus for manufacturing trichlorosilane by decomposition reacting polymers with hydrogen chloride at a high temperature, the apparatus comprising:
a decomposition furnace into which the polymers including high-boiling chlorosilanes generated in a polycrystalline silicon manufacture process, a trichlorosilane manufacture process, or a conversion process and hydrogen chloride are introduced, the decomposition furnace comprising:
a heating device which heats an interior of the decomposition furnace;
a reaction chamber which is formed in the decomposition furnace;
a center tube which is provided in the reaction chamber along a longitudinal direction of the reaction chamber and has a lower-end opening portion opposed to an inner-bottom surface of the decomposition furnace;
a raw-material-supply pipe which supplies the polymer and the hydrogen chloride to an upper portion of the reaction chamber at an exterior of the center tube;
a gas-discharge pipe which leads out reacted gas from an upper end portion of the center tube, and
a plurality of rolling members which are provided at an inner-bottom portion of the reaction chamber; and
the apparatus further comprising a fin which is formed integrally with at least one of an outer peripheral surface of the center tube or an inner peripheral surface of the decomposition furnace, and which leads the polymer and the hydrogen chloride to the lower-end opening portion of the center tube so as to stir the polymer and the hydrogen chloride.