IP Library Granted Patent US 8,196,891
Granted Patent B2
US 8,196,891 · App. 11/986,538 · Granted Jun 12, 2012

Instrumented platform for vibration sensitive equipment

Assignee: Newport Corporation
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Quick Facts
Patent No.
US 8,196,891
App. No.
11/986,538
Granted
Jun 12, 2012
Kind
B2
Abstract

A platform that includes a vibration sensor located within an inner core of a table. The table may have a first plate that supports a vibration-sensitive payload. The first plate may be separated from a second plate by the inner core. The sensor can be located within the core directly below the device. The sensor can be connected to an electrical connector attached to an external surface of the table. A monitor can be readily plugged into the electrical connector to obtain vibration data from the sensor. The platform may also include a damper located within the inner core to reduce vibration of the table. The damper may be an active device that is connected to control circuits located within, or outside, the inner core.

Claims (29)

1. A platform assembly that supports a vibration-sensitive payload, comprising:

a tabletop having a first surface coupled to the vibration-sensitive payload, a second surface, and an inner core located between said first and second surfaces;

a damper located within the inner core, the damper including an active actuator therein;

a vibration sensor located within the inner core; and

a control circuit coupled to the vibration sensor and the active actuator, the control circuit configured to cause the active actuator to create an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of the first surface.

2. The assembly of claim 1 , wherein the vibration sensor is attached to the first surface.

3. The assembly of claim 1 , further comprising an electrical connector attached to an external surface of the platform and coupled to the vibration sensor.

4. The assembly of claim 1 , further comprising a monitor coupled to the vibration sensor.

5. The assembly of claim 1 , further comprising a honeycomb core within the inner core.

6. The assembly of claim 1 , wherein the vibration sensor includes a wireless transmitter.

7. A platform assembly that supports a vibration-sensitive payload, comprising:

a tabletop having a first surface coupled to the vibration-sensitive payload, a second surface and an inner core located between the first and second surfaces;

a damper located within the inner core;

a vibration sensor means for sensing a vibration of the first surface;

an active actuator located within the damper and coupled the vibration sensor means; and

a control circuit coupled to the vibration sensor and the active actuator, the control circuit configured to cause the active actuator to create an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of the first surface.

8. The assembly of claim 7 , wherein the first surface and the vibration sensor means includes a vibration sensor attached to the first surface.

9. The assembly of claim 7 , further comprising an electrical connector attached to an external surface of the platform and coupled to the vibration sensor means.

10. The assembly of claim 7 , further comprising a monitor coupled to the vibration sensor means.

11. The assembly of claim 7 , further comprising a honeycomb core within the inner core.

12. The assembly of claim 7 , wherein the vibration sensor means includes a wireless transmitter.

13. A platform assembly that supports a vibration-sensitive payload comprising:

a tabletop having a first surface configured to support a vibration-sensitive payload, a second surface, and an inner core located between and coupled to the first and second surfaces;

one or more vibration sensors located within the inner core configured to sense a vibration of a surface of the tabletop;

a damper located within the inner core configured to apply a force to a surface of the tabletop;

an active actuator located within the damper and coupled the vibration sensor

a control circuit coupled to the vibration sensor and the active actuator; and

a monitor in communication with the one or more sensors and the dampener, the monitor configured to receive vibration information from the one or more sensors and provide an excitation signal to the damper, wherein the damper is configured to apply an active force that emulates an effect of a viscous damper in a frequency domain encompassing a plurality of natural frequencies of a flexural vibration of the first surface in response to the excitation signal from the control circuit in communication with the monitor.

14. The device of claim 13 further comprising a honeycomb core within said inner core.

Assignments (13)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Oct 5, 2011
From: NEWPORT CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027019/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 21, 2007
From: RYABOY, VYACHESLAV; BOOTH, WARREN
To: NEWPORT CORPORATION
Reel/Frame 020193/0969 →
Continuity (2)
Continuation 10693222 · Oct 24, 2003
Related Publication 20080121779A1 · May 29, 2008