Method for manufacturing micro movable element
A method for manufacturing a micro movable element includes: forming a movable section, a frame, and a connecting section connecting the movable section with the frame on a substrate; bonding a film to a surface of the substrate in forming the movable section, the frame, and the connecting section; and patterning the film to form a support structure being bridged between the movable section and the frame.
1. A method for manufacturing a micro movable element, comprising:
forming a movable section, a frame, and a connecting section connecting the movable section with the frame on a substrate;
bonding a film to a surface of the substrate in during forming the movable section, the frame, and the connecting section;
patterning the film to form a support structure bridging the movable section and the frame;
attaching the substrate to a base after patterning the film;
removing the base after forming the movable section, the frame, and the connecting section; and
removing at least a part of the support structure after removing the base.
2. The method for manufacturing the micro movable element according to claim 1 , wherein
the support structure is made of an insulating material.