Method of manufacturing electronic device

1. A method of manufacturing an electronic device comprising:

forming a photosensitive SOG oxide layer on a multi-layer ceramics substrate made of metal oxide having a penetrating electrode, wherein a thickness of the photosensitive SOG oxide layer is approximately 0.5 μm or larger;

forming an opening by subjecting the photosensitive SOG oxide layer to an exposure treatment and a developing treatment so that an upper face of the penetrating electrode is exposed and the diameter of the opening is larger than that of the penetrating electrode; and

forming a passive element on the photosensitive SOG oxide layer, wherein the passive element is connected to the penetrating electrode through the opening and includes a spiral-shaped coil.

2. The method as claimed in claim 1 , wherein the passive element is comprises the spiral shaped coil and a capacitor.

3. The method as claimed in claim 1 , further comprising:

forming another photosensitive SOG oxide layer on a lower face of the multi-layer ceramics substrate; and

forming an opening in the another photosensitive SOG oxide layer so that a lower face of the penetrating electrode is exposed.

4. The method as claimed in claim 1 , further comprising:

forming a spiral-shaped first coil on the photosensitive SOG oxide layer; and

forming a spiral-shaped second coil above the first coil across a space.

5. The method as claimed in claim 1 , wherein a relative permittivity of the photosensitive SOG oxide layer is lower than that of the multi-layer ceramics substrate.