Method for forming pattern, thin film transistor, display device, method for manufacturing thereof, and television apparatus
View Patent ↗To provide a display device which can be manufactured with higher efficiency in the use of material through a simplified manufacturing process, and a method for manufacturing the display device. Another object is to provide a technique by which patterns of a wiring the like which constitutes the display device can be formed to a desired shape with good control. In a method for forming a pattern according to the present invention, a mask is formed over a light-transmitting substrate; a first region including a photocatalyst is formed over the substrate and the mask; the photocatalyst is irradiated with light through the substrate to modify a part of the first region; a second region is formed; and a composition containing a pattern forming material is discharged to the second region, thus, a pattern is formed. The mask does not transmit light.
1. A thin film transistor comprising:
a first conductive layer provided over a light-transmitting substrate;
an insulating layer over the light-transmitting substrate and the first conductive layer;
a photocatalyst provided over the insulating layer;
a material containing a fluorocarbon chain over the photocatalyst;
a first region and a second region in a surface of the material containing the fluorocarbon chain; and
a second conductive layer over the second region,
wherein density of the fluorocarbon chain contained in the first region is higher than density of the fluorocarbon chain contained in the second region.
2. A thin film transistor according to claim 1 , wherein the photocatalyst is titanium oxide.
3. A thin film transistor comprising:
a first conductive layer provided over a light-transmitting substrate;
an insulating layer over the light-transmitting substrate and the first conductive layer;
a photocatalyst provided over the insulating layer;
a material containing a fluorocarbon chain over the photocatalyst;
a first region and a second region in a surface of the material containing the fluorocarbon chain;
a second conductive layer over the second region; and
a semiconductor layer formed over the material containing the fluorocarbon chain and the second conductive layer,
wherein density of the fluorocarbon chain contained in the first region is higher than density of the fluorocarbon chain contained in the second region.
4. A thin film transistor according to claim 3 , wherein the photocatalyst is titanium oxide.
5. The thin film transistor according to claim 1 ,
wherein wettability of the first region is lower than that of the second region.
6. The thin film transistor according to claim 3 ,
wherein wettability of the first region is lower than that of the second region.
7. The thin film transistor according to claim 1 ,
wherein the first region is overlapped with the first conductive layer.
8. The thin film transistor according to claim 3 ,
wherein the first region is overlapped with the first conductive layer.
9. A display device including the thin film transistor according to claim 1 .
10. A display device including the thin film transistor according to claim 3 .
11. Television apparatus comprising a display screen constituted by a display device, the display device including the thin film transistor according to claim 1 .
12. Television apparatus comprising a display screen constituted by a display device, the display device including the thin film transistor according to claim 3 .