Image sensor and method of fabricating the same
An image sensor and a method of fabricating the same are provided. A pad region is disposed on a substrate. The pad region has a higher concentration of impurity ions than the substrate. The pad region is selectively removed using the substrate as an etch mask, thereby forming a hole. A conductive pad is formed in the hole of the substrate.
1. An image sensor, comprising:
an insulating layer having at least one conductive interconnection and a connection hole to expose the conductive interconnection;
a substrate disposed on the insulating layer and having a guide hole aligned with the connection hole;
a diffusion layer disposed on the substrate, on sidewalls of the guide hole and on sidewalls of the connection hole, and under the connection hole; and
an anti-reflection layer and an insulating spacer sequentially stacked in the guide hole and the connection hole to expose at least one of the diffusion layer and the conductive interconnection,
wherein the guide hole and the connection hole constitute a pad hole, and
wherein the substrate comprises a pixel array region having at least one photodiode and a peripheral circuit region having the pad hole, and the diffusion layer comprises impurity ions and is disposed in the pixel array region and in the peripheral circuit region.
2. The image sensor according to claim 1 ,
wherein the anti-reflection layer surrounds the sidewall of the pad hole, partially covers the bottom of the pad hole, and extends from the pad hole to the pixel array region and to the peripheral circuit region of the substrate; and
the insulating spacer is disposed on the sidewall of the pad hole.
3. The image sensor according to claim 2 , further comprising a conductive pad disposed on the anti-reflection layer around the pad hole and filling the pad hole.
4. An image sensor, comprising:
a pixel array region and a peripheral circuit region on a substrate,
wherein the pixel array region has a plurality of pixel regions such that light radiated to the pixel regions is convertible from optical signals into electrical signals,
wherein the peripheral circuit region surrounds the pixel array region, the peripheral circuit region comprising an optical black region and a peripheral region,
wherein the optical black region includes a light shielding layer,
wherein the peripheral region has a plurality of pad-forming regions, each pad-forming region having a conductive pad to electrically connect to outside of the image sensor,
wherein the substrate is disposed on an insulating layer and has a guide hole aligned with a connection hole in the insulating layer,
wherein the insulating layer includes at least one conductive interconnection exposed by the connection hole,
wherein a diffusion layer is disposed on the substrate, on sidewalls of the guide hole and the connection hole, and under the connection hole making contact with the at least one conductive interconnection, the guide hole and the connection hole forming a pad hole, the diffusion layer comprising impurity ions and being disposed in the pixel array region and in the peripheral circuit region,
wherein an anti-reflection layer and an insulating spacer are stacked in the pad hole,
wherein the pixel array region further comprises at least one photodiode and the peripheral circuit region includes at least one pad hole, wherein the anti-reflection layer surrounds the sidewall of the at least one pad hole, partially covers the bottom of the at least one pad hole, and extends from the at least one pad hole to the pixel array region and to the peripheral circuit region,
wherein the insulating spacer is disposed on the sidewall of the at least one pad hole, and
wherein the conductive pad is disposed on the anti-reflection layer, around the at least one pad hole, fills the at least one pad hole and contacts the diffusion layer.