Er doped III-nitride materials and devices synthesized by MOCVD
View Patent ↗This disclosure relates to the synthesis of Er doped GaN epilayers by in-situ doping by metal-organic chemical vapor deposition (MOCVD). In an embodiment, both above and below bandgap excitation results in a sharp PL emission peak at 1.54 μm. Contrary with other growth methods, MOCVD grown Er-doped GaN epilayers exhibit virtually no visible emission lines, an present a small thermal quenching effect. The Er incorporation has very little effect on the electrical conductivity of the GaN epilayers and Er doped layers retain similar electrical properties as those of undoped GaN.
1. An apparatus for preparing an erbium-doped III-V semiconductor device capable of optical amplification in the 1.54 micron wavelength band, the apparatus comprising:
an erbium bubbler for providing an organic erbium vapor in hydrogen; (support paragraph 19)
a metal-organic chemical vapor deposition (MOCVD) reactor;
sources for at least ammonia and additional organometallic compounds, the ammonia and additional organometallic sources coupled to provide additional organometallic vapors and ammonia to the reactor;
the additional organometallic compounds including gallium compounds; and
a pipeline extending from the erbium bubbler to the reactor, the pipeline separate such that the organic erbium vapor does not mix with the ammonia and additional organometallic compounds until the erbium vapor, ammonia, and additional organometallic compounds are inside the reactor.
2. The apparatus of claim 1 configured to maintain a pressure of the erbium bubbler nearly the same as a pressure of the deposition reactor during incorporation of erbium into III-Nitride materials by MOCVD.
3. The apparatus of claim 2 , wherein the reactor is configured with sources for organometallic compounds of indium, gallium, aluminum, and magnesium.
4. The apparatus of claim 2 , wherein the erbium bubbler provides vapors of Tris(n-butylcyclopentadienyl)Erbium.
5. An optical amplifier for the 1.54 micron band comprising
An erbium-doped material III-N material comprising gallium;
The III-N material having a stronger emissions peak at 1.5 microns than at 1.0 microns;
Excitation apparatus selected from the group consisting of a light source and current injection excitation apparatus.
6. The optical amplifier of claim 5 comprising a quantum well structure.
7. The optical amplifier of claim 6 wherein the excitation apparatus comprises a light source providing light comprising at least light at 980 nm, 800 nm, 661 nm, 538 nm, 500 nm, 460 nm, or 410 nm wavelength.
8. The optical amplifier of claim 6 fabricated using an MOCVD apparatus comprising
an erbium bubbler for providing an organic erbium vapor in hydrogen; (support paragraph 19)
a metal-organic chemical vapor deposition (MOCVD) reactor;
sources for at least ammonia and additional organometallic compounds, the ammonia and additional organometallic sources coupled to provide additional organometallic vapors and ammonia to the reactor; and
a pipeline extending from the erbium bubbler to the reactor, the pipeline separate such that the organic erbium vapor does not mix with the ammonia and additional organometallic compounds until the erbium vapor, ammonia, and additional organometallic compounds are inside the reactor.
9. The optical amplifier of claim 6 having current injection excitation apparatus comprising a III-nitride emitter comprising aluminum and gallium adjacent a Er-doped III-N waveguide.
10. The optical amplifier of claim 9 fabricated using an MOCVD apparatus comprising
an erbium bubbler for providing an organic erbium vapor in hydrogen; (support paragraph 19)
a metal-organic chemical vapor deposition (MOCVD) reactor;
sources for at least ammonia and additional organometallic compounds, the ammonia and additional organometallic sources coupled to provide additional organometallic vapors and ammonia to the reactor; and
a pipeline extending from the erbium bubbler to the reactor, the pipeline separate such that the organic erbium vapor does not mix with the ammonia and additional organometallic compounds until the erbium vapor, ammonia, and additional organometallic compounds are inside the reactor.