IP Library Granted Patent US 8,231,855
Granted Patent B2
US 8,231,855 · App. 12/980,111 · Granted Jul 31, 2012

Method for production of sulfur hexafluoride from sulfur tetrafluoride

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Quick Facts
Patent No.
US 8,231,855
App. No.
12/980,111
Granted
Jul 31, 2012
Kind
B2
Abstract

Disclosed is a method for an energy-efficient improvement in the production of sulfur hexafluoride, and eliminates the generation of other byproducts. The process is an oxidative fluorination of sulfur tetrafluoride by CoF 3 /F 2 , where CoF 3 is solid stationary phase that can be regenerated.

Claims (39)

1. A method for producing sulfur hexafluoride by oxidative fluorination, comprising the steps of:

providing a reaction vessel for containment of a catalyst;

placing a selected quantity of cobalt trifluoride (CoF 3 ) as the catalyst in said reaction vessel;

maintaining a temperature in said reaction vessel at 25-450° C.;

attaching said reaction vessel to a source for each of N 2 , SF 4 and F 2 /N 2 by transfer lines;

feeding a first stream of F 2 /N 2 and a second stream containing a mixture of N 2 +SF 4 into said reaction vessel by transfer lines;

passing said first and second streams through said reaction vessel under a pressure of 1-50 PSIG to produce a flow of SF 6 gas; and

passing said flow of SF 6 gas to a collection vessel kept at approximately −78° C. or cooler.

2. The method of producing sulfur hexafluoride of claim 1 , which further comprises the step of passing said flow of SF 6 gas from said reaction vessel through an alkaline scrubber for stripping of contaminants from SF 6 gas before said collection vessel.

3. The method of producing sulfur hexafluoride of claim 2 , wherein a solution of KOH is used in said alkali scrubber.

4. The method of producing sulfur hexafluoride of claim 1 , which further comprises the step of using an agitator in the reaction vessel.

5. The method of producing sulfur hexafluoride of claim 4 , in which said agitator comprises an auger in a horizontally oriented reaction vessel.

6. The method of producing sulfur hexafluoride of claim 4 , in which said agitator comprises a stirrer in a vertically oriented reaction vessel.

7. The method of producing sulfur hexafluoride of claim 1 , in which said catalyst is packed in said reaction vessel to a density of at least 3 Kg/L.

8. The method of producing sulfur hexafluoride of claim 7 , in which said catalyst is packed in said reaction vessel to a density of approximately 3.9 Kg/L.

9. The method of producing sulfur hexafluoride of claim 1 , wherein a thermostatically controlled heater is used to maintain the temperature in said reaction vessel.

10. The method of producing sulfur hexafluoride of claim 1 , which further comprises the step of passing SF 6 gas through an analytical instrumentation device before said collection vessel.

11. The method of producing sulfur hexafluoride of claim 10 which further comprises the step of attaching a vacuum source to said transport transfer lines for flushing gas from said lines.

12. The method of producing sulfur hexafluoride of claim 1 which further comprises the step of providing a mass flow controller (MFC) in at least one of the transfer lines.

13. The method of producing sulfur hexafluoride of claim 12 in which said MFC is provided at least in the transfer line for SiF 4 .

14. The method of producing sulfur hexafluoride of claim 12 in which said MFC is provided at least in the transfer line for F 2 /N 2 .

15. A method for producing sulfur hexafluoride by oxidative fluorination, comprising the steps of:

providing a reaction vessel for containment of a catalyst;

placing a selected quantity of cobalt trifluoride (CoF 3 ) as the catalyst in said reaction vessel;

maintaining a temperature in said reaction vessel above 100° C.;

attaching said reaction vessel to a source for each of N 2 , SF 4 and F 2 /N 2 ;

feeding a first stream of F 2 /N 2 and a second stream containing a mixture of N 2 +SF 4 into said reaction vessel;

passing said first and second streams through said reaction vessel under a pressure of greater than 10 PSIG to produce a flow of SF 6 gas; and

passing said flow of SF 6 gas to a collection vessel kept at approximately −76° C. or cooler.

16. A method for producing sulfur hexafluoride by oxidative fluorination, comprising the steps of:

providing a reaction vessel for containment of a catalyst;

placing a selected quantity of CoF 3 as said catalyst, packed in said reaction vessel to a density of at least 3 Kg/L;

maintaining a temperature in said reaction vessel above 100° C.;

attaching said reaction vessel to a source for each of N 2 , SF 4 and F 2 /N 2 ;

using an agitator in said reaction vessel;

feeding a first stream of F 2 /N 2 and a second stream containing a mixture of N 2 +SF 4 into said reaction vessel;

passing said first and second streams through said reaction vessel under a pressure of greater than 10 PSIG to form a flow of SF 6 gas;

passing said effluent SF 6 gas from said reaction vessel through an alkaline scrubber for stripping of contaminants from SF 6 gas; and

passing said flow of SF 6 gas to a collection vessel kept at approximately −76° C. or cooler.

Assignments (1)
CONFIRMATORY LICENSE Recorded Mar 9, 2015
From: PEARLHILL TECHNOLOGIES, LLC
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 035146/0016 →
Continuity (1)
Related Publication 20120164060A1 · Jun 28, 2012