IP Library › Granted Patent US 8,238,647
Granted Patent B2
US 8,238,647 · App. 13/170,037 · Granted Aug 7, 2012

Method and system for defect detection

Assignee: Applied Materials Israel, Ltd.
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,238,647
App. No.
13/170,037
Granted
Aug 7, 2012
Kind
B2
Abstract

A system, method and computer program product for defect detection, the method includes: (i) retrieving a second pixel of a second image that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods; (ii) searching a third pixel of the second image such that a neighborhood of the second pixel is similar to a neighborhood of the third pixel; (iii) retrieving a fourth pixel of the first image that corresponds to the third pixel; and (iv) comparing between the tested pixel and the fourth pixel.

Claims (22)

1. A method for defect detection, the method comprising:

retrieving a second pixel of a second image of an object that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods;

searching a golden matching pixel of a second golden image such that a neighborhood of the golden matching pixel is similar to a neighborhood of the second pixel;

retrieving a corresponding golden pixel of a first golden image that corresponds to the golden matching pixel;

comparing between the tested pixel and the corresponding golden pixel; and

identifying defects in the object based on the comparison,

wherein each respective golden matching pixel and golden pixel of a golden image is a pixel of an image representing a defect-free object.

2. The method according to claim 1 further comprising repeating the searching for multiple tested pixels and generating statistics representative of a number of pixels found during the searching.

3. A non-transitory computer readable medium having computer readable code for defect detection embodied therein, the computer-readable code comprising instructions for:

retrieving a second pixel of a second image of an object that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods;

searching a golden matching pixel of a second golden image such that a neighborhood of the golden matching pixel is similar to a neighborhood of the second pixel;

retrieving a corresponding golden pixel of a first golden image that corresponds to the golden matching pixel;

comparing between the tested pixel and the corresponding golden pixel; and identifying defects in the object based on the comparison,

wherein each respective golden matching pixel and golden pixel of a golden image is a pixel of an image representing a defect-free object.

4. The computer readable medium of claim 3 wherein the computer-readable code comprises instructions for: searching for multiple pixels of the second image that have neighborhoods that match a neighborhood of the second pixel.

5. The computer readable medium of claim 4 wherein the computer-readable code comprises instructions for: repeating the searching for multiple tested pixels and generating statistics representative of a number of pixels found during the searching.

6. The computer readable medium of claim 3 wherein the computer-readable code comprises instructions for: generating a synthetic image by replacing tested pixels by reference pixels.

7. A system for defect detection, the system comprising: a memory unit adapted to store information representative of neighborhoods of pixels within a first image of an object and within a second image of the object; and a processor, adapted to: retrieve a second pixel of a second image of the object that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods;

search a golden matching pixel of a second golden image such that a neighborhood of the golden matching pixel is similar to a neighborhood of the second pixel; retrieve a corresponding golden pixel of a first golden image that corresponds to the golden matching pixel; and compare between the tested pixel and the corresponding golden pixel, wherein each respective golden matching pixel and golden pixel of a golden image is a pixel of an image representing a defect-free object.

8. The system according to claim 7 wherein the processor is adapted to search for multiple pixels of the second image that have neighborhoods that match a neighborhood of the second pixel.

9. The system according to claim 8 wherein the processor is adapted to repeat the searching for multiple tested pixels and generate statistics representative of a number of pixels found during the searching.

10. The system according to claim 7 wherein the processor is adapted to identify defects in the object based on the comparison.

Continuity (3)
Division 11831675 · Jul 31, 2007
Provisional Application 60820924 · Jul 31, 2006
Related Publication 20110255774A1 · Oct 20, 2011