IP Library › Granted Patent US 8,250,695
Granted Patent B2
US 8,250,695 · App. 12/573,500 · Granted Aug 28, 2012

Roller assembly for a brush cleaning device in a cleaning module

Assignee: Applied Materials, Inc.
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Quick Facts
Patent No.
US 8,250,695
App. No.
12/573,500
Granted
Aug 28, 2012
Kind
B2
Abstract

Embodiments described herein relate to an apparatus and method for a roller assembly that may be utilized in a brush cleaning module. In one embodiment, a roller assembly is described. The roller assembly includes an annular groove having at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate.

Claims (19)

1. A roller assembly adapted to support or rotate a substrate in a brush cleaning module, comprising:

a first washer; and

a second washer, the first washer and the second washer having an annular groove formed at least partially in a surface of the first washer or the second washer, the annular groove including at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate, wherein the annular groove includes a bottom surface, the bottom surface being formed entirely by the second washer.

2. A roller assembly adapted to support or rotate a substrate in a brush cleaning module, comprising:

a first washer; and

a second washer, the first washer and the second washer having an annular groove formed at least partially in a surface of the first washer or the second washer, the annular groove including at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate, wherein each of the at least two opposing sidewalls includes a textured surface.

3. The roller assembly of claim 2 , wherein the textured surface includes a finish of about 2 microns Ra to about 4 microns Ra.

4. The roller assembly of claim 3 , wherein the textured surface includes a grid pattern.

5. The roller assembly of claim 3 , wherein the textured surface includes a pattern comprising one or more raised structures.

6. The roller assembly of claim 5 , wherein the raised structures include one or more circular segments.

7. A roller assembly for supporting or rotating a substrate in a brush cleaning module, comprising:

a washer assembly sandwiched between a hub and a flange, the washer assembly comprising:

a first washer; and

a second washer contacting a surface of the first washer, the first washer and second washer having sidewalls defining an annular groove adapted to receive a periphery of a substrate, the annular groove having a width that is less than a thickness of the periphery of the substrate, wherein the annular groove includes a bottom surface corresponding to the width of the annular groove, the bottom surface being formed entirely by the second washer.

8. The roller assembly of claim 7 , wherein the sidewalls include a textured surface.

9. The roller assembly of claim 8 , wherein the annular groove comprises a first sidewall and a second sidewall.

10. The roller assembly of claim 9 , wherein the first sidewall or the second sidewall includes a textured surface.

11. The roller assembly of claim 9 , wherein the first sidewall and the second sidewall includes a textured surface.

12. The roller assembly of claim 8 , wherein the first sidewall and the second sidewall includes a surface roughness that is about 2 microns Ra to about 4 microns Ra.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 22, 2009
From: KARUPPIAH, LAKSHMANAN; ZHANG, DAN; YAVELBERG, SIMON; ATKINSON, JIM K.; CHEN, HUNG CHIH; MANTO, NOEL; DOMIN, JONATHAN
To: APPLIED MATERIALS, INC.
Reel/Frame 023412/0106 →
Continuity (1)
Related Publication 20110079245A1 · Apr 7, 2011