Oxide thin film transistor
An oxide thin film transistor and a method of manufacturing the oxide TFT are provided. The oxide thin film transistor (TFT) including: a gate; a channel formed to correspond to the gate, and a capping layer having a higher work function than the channel; a gate insulator disposed between the gate and the channel; and a source and drain respectively contacting either side of the capping layer and the channel and partially on a top surface of the capping layer.
1. An oxide thin film transistor (TFT) comprising:
a gate;
a channel on the gate;
a capping layer on the channel, the capping layer having a higher work function than the channel, the capping layer and the channel having substantially the same width;
a gate insulator between the gate and the channel; and
a source and drain each partially covering a top surface of the capping layer and each covering sides of the capping layer and sides of the channel, wherein the capping layer includes an oxide not included in the channel.
2. The oxide TFT of claim 1 , wherein the channel is formed of a material of In—Zn oxide doped with Ni.
3. The oxide TFT of claim 1 , wherein the channel is formed of a material of Ni—In—Zn oxide doped with a first, a second, or a third group transition element.
4. The oxide TFT of claim 3 , wherein the first group transition element may be Cu, Ag, or Au, the second group transition element may be Pd, Pt, or Ds, and the third group transition element may be Co, Ir, or Mt.
5. The oxide TFT of claim 2 , wherein the capping layer is Ga—In—Zn oxide.
6. The oxide TFT of claim 2 , wherein the capping layer is Ga—In—Zn oxide doped with at least one of Cu, Ag, Au, Pd, Pt, and DS.