Organic electroluminescence device, process of producing organic electroluminescence device, and electronic apparatus
An organic electroluminescence device includes a substrate, a plurality of light-emitting elements arranged on the substrate, each including a pair of electrodes and an organic light-emitting layer disposed between the electrodes, an organic buffer layer covering the plurality of light-emitting elements, and a gas barrier layer covering the organic buffer layer. The gas barrier layer has a structure wherein first inorganic films and second inorganic films are alternately stacked. The first inorganic films contain a silicon compound containing nitrogen, the second inorganic films contain an oxide of the formation material of the first inorganic films and each have a thickness smaller than that of each first inorganic film. The numbers of the first inorganic films and the second inorganic films are each at least two.
1. An organic electroluminescence device comprising:
a substrate;
a plurality of light-emitting elements arranged above the substrate, each of the plurality of light-emitting elements including a pair of electrodes and an organic light-emitting layer disposed between the electrodes;
an organic buffer layer covering the plurality of light-emitting elements;
a gas barrier layer covering the organic buffer layer; and
a sealing layer that is arranged on the gas barrier layer, the sealing layer overlapping a peripheral end of the organic buffer layer,
wherein
the gas barrier layer has a structure wherein first inorganic films and second inorganic films are alternately stacked, wherein
the first inorganic films contain a silicon compound containing nitrogen;
the second inorganic films contain an oxide of the formation material of the first inorganic films and each have a thickness smaller than that of each first inorganic film;
the numbers of the first inorganic films and the second inorganic films are each at least two; and
a peripheral end of the gas barrier layer being arranged between a peripheral end of the substrate and a peripheral end of the sealing layer.
2. The organic electroluminescence device according to claim 1 , further comprising:
an electrode-protecting layer disposed between the plurality of light-emitting elements and the organic buffer layer and covering the surfaces of the plurality of light-emitting elements,
wherein
the electrode-protecting layer has a structure wherein third inorganic films and fourth inorganic films are alternately stacked, wherein
the third inorganic films contain a silicon compound containing nitrogen;
the fourth inorganic films contain an oxide of the formation material of the third inorganic films and each have a thickness smaller than that of each third inorganic film; and
the numbers of the third inorganic films and the fourth inorganic films are each at least two.
3. The organic electroluminescence device according to claim 1 , wherein the second inorganic film contains silicon atoms and oxygen atoms with a ratio in number of atoms of oxygen to silicon being one or more and two or less.
4. The organic electroluminescence device according to claim 1 , wherein the second inorganic film has a thickness of 0.1 nm or more and 10 nm or less.
5. The organic electroluminescence device according to claim 2 , wherein the fourth inorganic film contains silicon atoms and oxygen atoms with a ratio in number of atoms of oxygen to silicon being one or more and two or less.
6. The organic electroluminescence device according to claim 2 , wherein the fourth inorganic film has a thickness of 0.1 nm or more and 10 nm or less.
7. The organic electroluminescence device according to claim 1 , wherein the peripheral end of the organic buffer layer has an angle of 20 degrees or less.
8. A process of producing an organic electroluminescence device according to claim 1 , comprising:
forming a material film containing a silicon compound containing nitrogen; and
forming an oxide film containing an oxide of the formation material of the material film on the surface of the material film by treating the surface of the material film with oxygen plasma.
9. An electronic apparatus including an organic electroluminescence device according to claim 1 .
10. The organic electroluminescence device according to claim 1 , wherein each of the second inorganic films is disposed between two first inorganic films, and at least two first inorganic films are disposed as the outermost layers of the gas barrier layer.
11. The organic electroluminescence device according to claim 1 , the sealing layer being disposed to only overlap the peripheral end of the organic buffer layer, and the sealing layer being disposed only between the plurality of light-emitting elements and the peripheral end of the gas barrier layer.
12. The organic electroluminescence device according to claim 1 , the sealing layer being directly disposed only on the peripheral end of the gas barrier layer.