IP Library › Granted Patent US 8,268,153
Granted Patent B2
US 8,268,153 · App. 13/077,382 · Granted Sep 18, 2012

Substrate and method for fabricating the same

Assignee: Panasonic Corporation
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Quick Facts
Patent No.
US 8,268,153
App. No.
13/077,382
Granted
Sep 18, 2012
Kind
B2
Abstract

A single crystal of zinc oxide which is c-axis oriented with use of electrolytic deposition method is formed on an amorphous carbon layer, after the amorphous carbon layer is provided on an inexpensive graphite substrate. The amorphous carbon layer is provided by oxidizing the surface of the graphite substrate.

Claims (4)

1. A method for fabricating a substrate, comprising the following steps (a) and (b) in order:

(a) oxygen-ashing a surface of a graphite substrate to form an amorphous carbon layer on the surface of the graphite substrate, and

(b) forming a monocrystalline ZnO layer on the amorphous carbon layer by electrolytic deposition method, wherein:

the amorphous carbon layer has a thickness of not less than 3 nm and not more than 50 nm.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 22, 2011
From: HAMADA, TAKAHIRO; ITOH, AKIHIRO; NAGAO, NOBUAKI
To: PANASONIC CORPORATION
Reel/Frame 026167/0003 →
Priority Claims (1)
JP 2009-276281 · Dec 4, 2009 · national
Continuity (2)
Continuation PCTJP2010006537 · Nov 8, 2010
Related Publication 20110174626A1 · Jul 21, 2011