High aspect ratio openings
A capacitor forming method includes forming an electrically conductive support material over a substrate, with the support material containing at least 25 at % carbon. The method includes forming an opening through at least the support material where the opening has an aspect ratio of at least 20:1 within a thickness of the support material. After forming the opening, the method includes processing the support material to effect a reduction in conductivity, and forming a capacitor structure in the opening.
1. A capacitor forming method comprising:
forming an electrically conductive support material over a substrate, the support material containing at least 25 at % carbon;
forming an opening through at least the support material, the opening having an aspect ratio of at least 20:1 within a thickness of the support material;
after forming the opening, processing the support material to effect a reduction in conductivity of the support material; and
forming a capacitor structure in the opening.
2. The method of claim 1 , wherein the method includes effecting the reduction in conductivity to the support material by heating the support material to approximately 180 degrees Celsius for approximately 30 minutes.
3. The method of claim 1 , wherein the method includes effecting the reduction in conductivity by heating the support material to a temperature at least 180 degrees Celsius, but below 200 degrees Celsius, for approximately 30 minutes.
4. The method of claim 1 , wherein the method includes effecting the reduction in conductivity to the support material using photon irradiation.
5. The method of claim 1 , wherein the method includes effecting the reduction in conductivity to the support material using electromagnetic field exposure.
6. The method of claim 1 wherein the support material contains at least 50 at% carbon.
7. The method of claim 1 wherein the carbon is primarily in the form of an electrically conductive, carbon backbone polymer.
8. The method of claim 7 wherein the support material is a mixture of the conductive polymer and a polymeric carrier matrix.
9. The method of claim 8 wherein processing the support material causes a microphase separation of the conductive polymer and the carrier matrix polymer into separate micelles.
10. The method of claim 1 wherein the support material consists of from about 55 to about 70 at % carbon, about 5 at % or less of nitrogen, oxygen, sulfur, metals, and semimetals, and the remainder hydrogen.
11. The method of claim 1 wherein the support material is non-crystalline.
12. The method of claim 1 wherein the support material consists of amorphous carbon, intermediate carbon, transparent carbon, or a combination thereof.
13. The method of claim 1 wherein the support material further comprises titanium and/or silicon.
14. The method of claim 1 wherein the opening is formed only through the support material and the opening has a circular outer periphery.
15. The method of claim 1 wherein forming the opening comprises anisotropically etching the support material.
16. The method of claim 15 wherein the etching uses a plasma generated from a gas composition containing O 2 along with SO 2 , SiCl 4 , N 2 , or N 2 /CH x F y , where x and y are integers from 0 to 4 and the sum of x and y equals 4.
17. The method of claim 1 wherein the method includes:
foaming a second opening through at least the support material, the opening having an aspect ratio of at least 20:1 within a thickness of the support material;
forming a conductive cell plate layer in the openings; and
removing at least a portion of the support material between the openings to form a double-sided container structure before forming a dielectric layer over conductive cell plate layer or processing the support material to effect a reduction in conductivity.