Organic vapor jet printing system

1. A method of depositing an organic film onto a substrate, comprising:

heating an organic material to form an organic vapor;

transporting the organic vapor in a carrier gas from a source cell into a heated chamber;

heating the heated chamber sufficiently to form a substantially uniform organic flux of the carrier gas and organic vapor by diffusive mixing of the gas and vapor within the heated chamber;

transporting the organic flux to a nozzle body;

directing the organic flux to a cooled substrate;

increasing the pressure of the organic flux with a pump before the organic flux exits the nozzle body, the pump being disposed between the source cell and the nozzle body; and

depositing the organic material onto a surface of the cooled substrate to form an organic film on the substrate.

2. The method of claim 1 , wherein the pressure is increased by applying pressure pulses to the organic flux.

3. The method of claim 2 , wherein the organic material is deposited on a discrete region of the substrate when a pressure pulse is applied, and substantially no organic material is deposited when no pressure pulse is applied.

4. The method of claim 1 , wherein the pump is a piston pump.

5. The method of claim 1 , wherein the pump is actuated with a crank.

6. The method of claim 1 , wherein the pump is actuated with a solenoid.

7. The method of claim 1 , wherein the pump is actuated with a piezoelectric material.

8. The method of claim 1 , wherein the pump is a microelectromechanical system.

9. The method of claim 1 , wherein the pump is disposed at a position proximate to the nozzle body.

10. The method of claim 1 , wherein the nozzle body comprises an array of nozzles.

11. The method of claim 1 , further comprising translating the cooled substrate with respect to the nozzle body.

12. The method of claim 1 , further comprising regulating the temperature of the pump with a thermal bath.

13. The method of claim 1 , further comprising depositing a plurality of organic materials from a plurality of source cells.

14. A method of depositing an organic film onto a substrate, comprising:

heating an organic material to form an organic vapor;

transporting the organic vapor in a carrier gas from a source cell into a heated chamber;

heating the heated chamber sufficiently to form a substantially uniform organic flux of the carrier gas and organic vapor by diffusive mixing of the gas and vapor within the heated chamber;

transporting the organic flux from the heated chamber to a nozzle body;

directing the organic flux to a cooled substrate;

increasing the pressure of the organic flux with a pump downstream of the heated chamber and before the organic flux exits the nozzle body; and

depositing the organic material onto a surface of the cooled substrate to form an organic film on the substrate.

15. The method of claim 14 , wherein the pump is connected to a transport line that transports the organic flux to the nozzle body.

16. The method of claim 15 , wherein the pump is disposed at a position closer to the nozzle body than the heating chamber.

17. The method of claim 15 , wherein the pump connects the heating chamber and the transport line.

18. The method of claim 15 , wherein the pump is disposed at a position proximate to the nozzle body.

19. The method of claim 14 , wherein the pump increases the pressure of the organic flux by a factor of 10 or more between a pump inlet and a pump outlet.

20. The method of claim 14 , wherein the pressure is increased by applying pressure pulses to the organic flux.

21. The method of claim 20 , wherein the organic material is deposited on a discrete region of the substrate when a pressure pulse is applied, and substantially no organic material is deposited when no pressure pulse is applied.

22. The method of claim 14 , wherein the organic material is deposited by a plurality of nozzles in communication with the heating chamber, at least two of the plurality of nozzles including a separate pump.