IP Library › Granted Patent US 8,306,291
Granted Patent B2
US 8,306,291 · App. 12/158,226 · Granted Nov 6, 2012

Method for localizing labels in a sample

Assignee: FEI Company
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Quick Facts
Patent No.
US 8,306,291
App. No.
12/158,226
Granted
Nov 6, 2012
Kind
B2
Abstract

The invention relates to a method in which labels are introduced in a sample, a flat surface is prepared on the sample and a series of images is made of the sample surface with e.g. a scanning electron microscope. The labels may be gold labels or e.g. fluorescent labels. By removing a surface layer between obtaining each image, labels at the surface in one image will be removed and will not be visible in a subsequent image. Thereby a 3D reconstruction of the position of labels in the sample can be made.

Claims (37)

1. A method for analysing a sample, the method comprising:

preparing a substantially flat surface on the sample,

exposing the sample to a labeling agent containing labels, thereby introducing labels into the sample,

obtaining a series of images of the sample, each of the images comprising information of the sample, said information made available by exposing the sample to a beam of particles,

obtaining the relative position of the labels in each of the images thus obtained, and

from the relative positions obtained, deriving a 3D reconstruction of the relative position of the labels, wherein

each of the images show the sample in a substantially identical orientation, and

a surface layer is removed from the sample between each successive image of the series of images, leaving a fresh surface layer substantially parallel to the flat surface initially formed.

2. The method according to claim 1 in which the labels are luminescent labels, the particle beam is a finely focused particle beam scanned over the surface of the sample and wherein the information comprises information proportional to the amount of light emitted from said labels in response to exposure to the particle beam.

3. The method according to claim 2 in which the luminescent labels are inorganic nanoparticles, said nanoparticles comprising a host lattice doped with luminescent activator ions acting as luminescent centres for said nanoparticles, and wherein obtaining an image comprises detecting the light emitted from said activator ions.

4. The method according to claim 2 in which the luminescent labels are inorganic quantum dot nanoparticles.

5. The method according to claim 2 in which the luminescent labels are organic labels.

6. The method according to claim 1 in which the labels comprise high-Z material.

7. The method according to claim 6 in which the high-Z material comprises gold nanoparticles.

8. The method according to claim 7 in which the gold nanoparticles are enhanced with silver or gold.

9. The method according to claim 6 in which obtaining the image comprises processing a signal detected by a particle detector.

10. The method according to claim 6 in which obtaining the image comprises processing a signal detected by an X-ray detector.

11. The method according to claim 6 in which the one or more surface layers are removed using a particle beam.

12. The method according to claim 11 in which the particle beam is a finely focused beam.

13. The method according to claim 11 in which the one or more surface layers are removed with a beam of electromagnetic radiation.

14. The method according to claim 11 where the removal of the one or more surface layers is performed in-situ in a particle-optical apparatus.

15. The method according to claim 11 where an upper boundary of a label is determined based on the absence of the label in an image and the presence of the label in a subsequent image, and where a lower boundary of a label is determined based on the presence of the label in an image and the absence of the label in a subsequent image.

16. The method of claim 7 in which obtaining the image comprises processing a signal detected by a particle detector.

17. The method of claim 7 in which obtaining the image comprises processing a signal detected by a back-scattered electron detector.

18. The method of claim 7 in which obtaining the image comprises processing a signal detected by an X-ray detector.

19. The method of claim 8 in which obtaining the image comprises processing a signal detected by an X-ray detector.

20. The method claim 1 in which the one or more surface layers are removed using a particle beam.

21. The method of claim 1 in which the one or more surface layers are removed with a beam of electromagnetic radiation.

22. The method of claim 1 where the removal of the one or more surface layers is performed in-situ in a particle-optical apparatus.

23. The method of claim 1 where an upper boundary of a label is determined based on the absence of the label in an image and the presence of the label in a subsequent image, and where a lower boundary of a label is determined based on the presence of the label in an image and the absence of the label in a subsequent image.

24. A method for analysing a sample, the method comprising:

preparing a substantially flat surface on the sample,

exposing the sample to a labeling agent containing labels, thereby introducing labels into the sample,

obtaining a series of images of the sample, each of the images comprising information of the sample, said information made available by exposing the sample to a beam of particles,

obtaining the relative position of the labels in each of the images thus obtained, and from the relative positions obtained, deriving a 3D reconstruction of the relative position of the labels, wherein

each of the images show the sample in a substantially identical orientation, and

a surface layer is removed from the sample between each successive image of the series of images, leaving a fresh surface layer substantially parallel to the flat surface initially formed, the surface layers being removed by irradiating the surface and the removed layer being thinner than the penetration depth of the radiation.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 15, 2008
From: SLINGERLAND, HENDRIK NICOLAAS
To: FEI COMPANY
Reel/Frame 021239/0945 →
Priority Claims (1)
EP 05112781 · Dec 22, 2005 · regional
Continuity (1)
Related Publication 20090220130A1 · Sep 3, 2009