Method for manufacturing semiconductor device
A high positional accuracy of a semiconductor chip is attained to stabilize the quality of a semiconductor device. In a die bonding process during assembly of an SIP, a microcomputer chip not required to have a high positional accuracy is picked up with a surface non-contact type collet and is die-bonded onto a first chip mounting portion, thereafter, an ASIC chip required to have a high positional accuracy is picked up with a surface contact type collet and die-bonded onto a second chip mounting portion. By thus using two types of collets properly, not only a high positional accuracy of the ASIC chip which has been die-bonded with the surface contact type collet is attained, but also the quality of the SIP is stabilized.
1. A method for manufacturing a semiconductor device, comprising the steps of:
(a) providing a lead frame, the lead frame having a chip mounting portion and a plurality of leads arranged around the chip mounting portion, the chip mounting portion including a first chip mounting portion and a second chip mounting portion disposed side by side with the first chip mounting portion;
(b) picking up a first semiconductor chip with a surface non-contact type collet and die-bonding the picked-up first semiconductor chip over the first chip mounting portion, wherein the first semiconductor chip is mounted over the first chip mounting portion through a paste material;
(c) after the step (b), picking up a second semiconductor chip with a surface contact type collet and die-bonding the picked-up second semiconductor chip over the second chip mounting portion, the second semiconductor chip is mounted over the second chip mounting portion through a paste material; and
(d) after the step (c), wire-bonding each of the first and second semiconductor chips, wherein after the step (c) and before the step (d) the paste material over the first chip mounting portion and the paste material over the second chip mounting portion are heat-cured at a time.
2. A method according to claim 1 , wherein the second semiconductor chip has a protective film over a circuit-formed surface thereof.
3. A method according to claim 2 , wherein the second semiconductor chip has a logic circuit.
4. A method according to claim 1 , wherein the first semiconductor chip has stepped concave portions in edges of a circuit-formed surface thereof.
5. A method according to claim 4 , wherein the first semiconductor chip is a microcomputer chip.
6. A method according to claim 1 ,
wherein in the step (d) first wires are bonded to the first semiconductor chip, while second wires and third wires larger in loop height than the second wires are bonded to the second semiconductor chip,
wherein the step (d) is followed by a step (e) of sealing the first and second semiconductor chips with sealing resin by resin molding,
wherein in the step (e) the sealing resin is poured so as to push the third wires in a direction away from the second wires.
7. A method according to claim 1 , wherein in the step (d) first wires are bonded to the first semiconductor chip, while second wires and third wires larger in loop height than the second wires are bonded to the second semiconductor chip, the first wires including wires which jump over the second semiconductor chip and are coupled to the leads.
8. A method according to claim 7 , wherein the thickness of the second semiconductor chip is smaller than that of the first semiconductor chip.
9. A method according to claim 1 ,
wherein in the step (d) first wires are bonded to the first semiconductor chip, while second wires and third wires larger in loop height than the second wires are bonded to the second semiconductor chip, and fourth wires are bonded to both the first and the second semiconductor chip.
10. A method for manufacturing a semiconductor device, comprising the steps of:
(a) providing a wiring substrate, the wiring substrate having a chip mounting portion and a plurality of bonding leads arranged around the chip mounting portion, the chip mounting portion including a first chip mounting portion and a second chip mounting portion disposed side by side with the first chip mounting portion;
(b) picking up a first semiconductor chip with a surface non-contact type collet and die-bonding the picked-up first semiconductor chip over the first chip mounting portion, wherein the first semiconductor chip is mounted over the first chip mounting portion through a paste material;
(c) after the step (b), picking up a second semiconductor chip with a surface contact type collet and die-bonding the picked-up second semiconductor chip over the second chip mounting portion, wherein the second semiconductor chip is mounted over the second chip mounting portion through a paste material; and
(d) after the step (c), wire-bonding each of the first and second semiconductor chips, wherein after the step (c) and before the step (d) the paste material over the first chip mounting portion and the paste material over the second chip mounting portion are heat-cured at a time.
11. A method according to claim 10 , wherein the second semiconductor chip has a protective film over a circuit-formed surface thereof.
12. A method according to claim 11 , wherein the second semiconductor chip has a logic circuit.