Device and method for detecting electrical properties of a sample of an excitable material
A device for detecting electrical properties of a sample of an excitable material, in particular of a silicon wafer, comprises a microwave source for generating a microwave field, a resonance system which is coupled to the microwave source in a microwave-transmitting manner, the resonance system comprising a microwave resonator with at least one opening and a sample to be examined which is arranged next to the at least one opening, at least one excitation source which is arranged in the surroundings of the sample for controlled electrical excitation of the sample, and a measuring device for measuring at least one physical parameter of the resonance system.
1. A device for detecting electrical properties of a sample of an excitable material, the device comprising:
a microwave source for generating a microwave field;
a resonance system which is coupled to the microwave source in a microwave-transmitting manner, the resonance system comprising a microwave resonator and a sample to be examined;
at least one excitation source arranged in the surroundings of the sample for controlled electrical excitation of the sample; and
a measuring device for measuring at least one physical parameter of the resonance system, wherein the microwave resonator is a cavity resonator with a cavity, said cavity resonator comprising an opening, the sample being arranged in front of said opening at a position outside said cavity, wherein a microwave-absorbing dielectric is arranged on the side of the sample remote from the opening.
2. A device according to claim 1 , wherein a microwave reflector is arranged on the side of the sample remote from the opening.
3. A device according to claim 1 , wherein the at least one excitation source is activated pulsedly.
4. A device according to claim 1 , wherein several excitation sources are provided.
5. A device according to claim 4 , wherein the excitation sources are activated sequentially.
6. A device according to claim 1 , wherein the sample and the cavity resonator are displaceable relative to each other in a plane perpendicular to the central longitudinal axis.
7. A device according to claim 1 , wherein the sample is a silicon wafer.
8. A device for detecting electrical properties of a sample of an excitable material, the device comprising:
a microwave source;
a resonance system coupled to said microwave source, said resonance system comprising a microwave cavity resonator, said microwave cavity resonator comprising a side wall, at least a portion of said side wall defining a cavity of said microwave cavity resonator, said cavity comprising an opening, said resonance system comprising a sample, said sample being arranged in front of said opening at a position outside said cavity, said microwave source generating one or more microwaves such that said one or more microwaves are reflected by at least a portion of said side wall through said opening to said sample to define at least one microwave travel path;
an excitation source for controlled electrical excitation of the sample, wherein a microwave-absorbing dielectric is arranged on one side of said sample, said resonator resonance system and said excitation source being arranged on another side of said sample; and
a measuring device for measuring at least one physical parameter of the resonance system.
9. A device in accordance with claim 8 , wherein said microwave cavity resonator comprises a first front wall, said one or more microwaves being reflected by at least a portion of said first front wall to define a portion of said at least one microwave travel path.
10. A device in accordance with claim 9 , wherein said microwave cavity resonator comprises a second front wall, said one or more microwaves being reflected by at least a portion of said second front wall to define another portion of said at least one microwave travel path.
11. A device in accordance with claim 8 , wherein said excitation source is activated pulsedly.
12. A device in accordance with claim 8 , further comprising:
another excitation source.
13. A device in accordance with claim 12 , wherein said excitation source and said another excitation source are activated sequentially.
14. A device in accordance with claim 8 , wherein the sample and the microwave cavity resonator are displaceable relative to each other in a plane perpendicular to a central longitudinal axis of said microwave cavity resonator.
15. A device for detecting electrical properties of a sample of an excitable material, the device comprising:
a microwave source;
a resonance system coupled to said microwave source, said resonance system comprising a microwave cavity resonator, said microwave cavity resonator comprising a side wall, at least a portion of said side wall defining a cavity of said microwave cavity resonator, said cavity comprising an opening, said resonance system comprising a sample, said sample being arranged in front of said opening at a position outside said cavity, said microwave source generating one or more microwaves such that said one or more microwaves are reflected by at least a portion of said side wall through said opening to said sample to define at least one microwave travel path;
an excitation source for controlled electrical excitation of the sample, wherein a microwave-absorbing dielectric and a microwave reflector are arranged on one side of said sample, said resonator resonance system and said excitation source being arranged on another side of said sample; and
a measuring device for measuring at least one physical parameter of the resonance system.