Microelectronic structure including a low k dielectric and a method of controlling carbon distribution in the structure
Embodiments of the present invention pertain to the formation of microelectronic structures. Low k dielectric materials need to exhibit a dielectric constant of less than about 2.6 for the next technology node of 32 nm. The present invention enables the formation of semiconductor devices which make use of such low k dielectric materials while providing an improved flexural and shear strength integrity of the microelectronic structure as a whole.
1. A method of fabricating a microelectronic device structure which includes a diffusion barrier material, a transitional area, and a carbon doped silicon oxide-comprising low k dielectric material, the method comprising:
forming the microelectronic device structure in a plasma enhanced chemical vapor deposition processing chamber, while controlling the flow rates of a combination of gases used to form said transitional area, wherein a flow rate of a helium carrier gas used to transport carbon-comprising reactive gases is ramped down during the formation of said transitional area, wherein a flow rate of an oxygen-comprising gas is also ramped down during the formation of said transitional area, and wherein the relative ramp down rates for said carbon-comprising helium carrier gas and said oxygen-comprising gas have a relationship such that a ratio of a ramp down rate of said carbon-comprising helium carrier gas to a ramp down rate of said oxygen-comprising gas ranges from about 60:1 to about 30:1, wherein oxygen is present at all times during formation of said transitional area, so that an adhesive strength between a deposited transitional area and an overlying or underlying material is improved.
2. A method in accordance with claim 1 , wherein said gases which form a plasma during formation of said transitional area in said microelectronic device structure are selected from the group consisting of organosilicon compounds, porogen compounds, an oxygen-containing source, and helium.
3. A method in accordance with claim 2 , wherein, during fabrication of said microelectronic device structure, said organosilicon compounds used to form said carbon doped silicon oxide-comprising low k dielectric materials are selected from the group consisting of tetramethylcyclotetrasiloxane, octamethylcyclotetrasiloxane, pentamethylcyclopentasiloxane, hexamethylcyclotri-siloxane, diethoxymethylsilane, dimethyldisiloxane, tetrasilano-2,6-dioxy-4,8-dimethylene, tetramethyldisiloxane, hexamethyldisiloxane, 1,3-bis(silanomethylene)-disiloxane, bis(1-methyldisiloxanyl)methane, bis(1-methyldisiloxanyl)propane, hexamethosydisiloxane, dimethyldimethoxysilane, and dimethoxymethylvinylsilane, and combinations thereof.
4. A method in accordance with claim 3 , wherein porogen compounds are added to said organosilicon compounds and are selected from the group consisting of cyclohexadiene, bicycloheptadiene, 1-methyl-4-(1-methyl-ethyl)-1,3-cyclohexadiene, 1-methyl-4-(1-methylethyl)-benzene, alpha-terpinene, 3-carene, fenchone, limonene, cyclopentene oxide, vinyl-1,4-dioxinyl ether, vinyl furyl ether, vinyl-1,4-dioxin, vinyl furan, methyl furoate, furyl formate, furyl acetate, furaldehyde, difuryl ketone, difuryl ether, difurfuryl ether, furan, 1,4 dioxin, and combinations thereof.
5. A method in accordance with claim 1 , or claim 2 , or claim 3 , or claim 4 wherein said oxygen-comprising gas is selected from the group consisting of O 2 , CO 2 , CO, O 3 , H 2 O, and combinations thereof.
6. A method in accordance with claim 5 , wherein said oxygen-comprising gas is O 2 .
7. A method in accordance with claim 1 or claim 2 wherein a dielectric constant of a carbon-doped silicon oxide layer formed in a transition area ranges from about 2.5 to about 2.6.
8. A method in accordance with claim 1 or claim 2 wherein a 4-point adhesion strength present in a transition area ranges from about 5.0 J/m 2 to about 7.0 J/m 2 .