Display device and manufacturing method thereof
View Patent ↗It is an object of the present invention to provide a technology for manufacturing a highly reliable display device at a low cost with high yield. In the present invention, a spacer is formed over a pixel electrode, thereby protecting the pixel electrode layer from a mask in formation of an electroluminescent layer. In addition, since a layer that includes an organic material that has water permeability is sealed in a display device with a sealing material and the sealing material and the layer that includes the organic material are not in contact, deterioration of a light-emitting element due to a contaminant such as water can be prevented. The sealing material is formed in a portion of a driver circuit region in the display device, and thus, the narrower frame margin of the display device can also be accomplished.
1. A display device comprising a pixel region, a connection region and an external terminal connection region,
the pixel region comprising a plurality of pixels, each of the plurality of pixels comprising:
a semiconductor layer including an impurity region;
a gate insulating layer over the semiconductor layer;
a gate electrode over the gate insulating layer;
a first insulating layer over the gate electrode;
a first opening that reaches the impurity region in the gate insulating layer and the first insulating layer;
a source electrode or a drain electrode connected to the impurity region through the first opening;
a second insulating layer over the source electrode or the drain electrode and the first insulating layer;
a second opening that reaches the source electrode or the drain electrode in the second insulating layer;
a first electrode connected to the source electrode or the drain electrode through the second opening;
a third insulating layer having an opening that reaches the first electrode, over the first electrode;
a plurality of spacers provided apart from the third insulating layer, on and in contact with the first electrode and inside the opening of the third insulating layer; and
an electroluminescent layer over the first electrode and the plurality of spacers,
the connection region comprising:
a wiring provided over the first insulating layer;
a third opening that reaches the wiring provided in the second insulating layer;
the third insulating layer which covers an upper edge portion of the third opening; and
a second electrode which is connected to the wiring through the third opening and is in contact with the third insulating layer,
wherein the source electrode or the drain electrode covers a portion of the gate electrode with the first insulating layer therebetween, and
wherein the second insulating layer provided with the third opening that reaches the wiring is placed over the wiring, and
the external terminal connection region comprising:
a terminal electrode layer;
a fourth insulating layer; and
a fifth insulating layer over the fourth insulating layer,
wherein the fourth insulating layer and the fifth insulating layer cover an edge portion of the terminal electrode layer,
wherein the fourth insulating layer is formed from a same layer as the second insulating layer, and
wherein the fifth insulating layer is formed from a same layer as the plurality of spacers.
2. A display device comprising a pixel region, a connection region and a an external terminal connection region,
the pixel region comprising a plurality of pixels, each of the plurality of pixels comprising:
a semiconductor layer including an impurity region;
a gate insulating layer over the semiconductor layer;
a gate electrode over the gate insulating layer;
a first insulating layer over the gate electrode;
a first opening that reaches the impurity region in the gate insulating layer and the first insulating layer;
a source electrode or a drain electrode connected to the impurity region through the first opening;
a second insulating layer over the source electrode or the drain electrode and the first insulating layer;
a second opening that reaches the source electrode or the drain electrode in the second insulating layer;
a first electrode connected to the source electrode or the drain electrode through the second opening;
a third insulating layer having an opening that reaches the first electrode, over the first electrode;
a plurality of spacers provided apart from the third insulating layer, on and in contact with the first electrode and inside the opening of the third insulating layer; and
an electroluminescent layer over the first electrode and the plurality of spacers, and
the connection region comprising:
a wiring provided over the first insulating layer;
a third opening that reaches the wiring provided in the second insulating layer;
the third insulating layer which covers an upper edge portion of the third opening;
a second electrode which is connected to the wiring through the third opening and is in contact with the third insulating layer; and
a sealing material over the first insulating layer,
wherein the source electrode or the drain electrode covers a portion of the gate electrode with the first insulating layer therebetween,
wherein the second insulating layer provided with the third opening that reaches the wiring is placed over the wiring, and
wherein the sealing material and the third insulating layer are not in contact with each other, and
the external terminal connection region comprising:
a terminal electrode layer;
a fourth insulating layer; and
a fifth insulating layer over the fourth insulating layer,
wherein the fourth insulating layer and the fifth insulating layer cover an edge portion of the terminal electrode layer,
wherein the fourth insulating layer is formed from a same layer as the second insulating layer, and
wherein the fifth insulating layer is formed from a same layer as the plurality of spacers.
3. The display device according to claim 1 , wherein the spacer has a columnar-shape.
4. The display device according to claim 2 , wherein the spacer has a columnar-shape.
5. A display device comprising a pixel region, a connection region and a an external terminal connection region,
the pixel region comprising a plurality of pixels, each of the plurality of pixels comprising:
a semiconductor layer including an impurity region;
a gate insulating layer over the semiconductor layer;
a gate electrode over the gate insulating layer;
a first insulating layer over the gate electrode;
a first opening that reaches the impurity region in the gate insulating layer and the first insulating layer;
a source electrode or a drain electrode connected to the impurity region through the first opening;
a second insulating layer over the source electrode or the drain electrode and the first insulating layer;
a second opening that reaches the source electrode or the drain electrode in the second insulating layer;
a first electrode connected to the source electrode or the drain electrode through the second opening;
a third insulating layer having an opening that reaches the first electrode, over the first electrode;
a plurality of spacers provided apart from the third insulating layer, on and in contact with the first electrode and inside the opening of the third insulating layer; and
an electroluminescent layer over the first electrode and the plurality of spacers, and
the connection region comprising:
a wiring provided over the first insulating layer;
a third opening that reaches the wiring provided in the second insulating layer;
the third insulating layer which covers an upper edge portion of the third opening;
a second electrode which is connected to the wiring through the third opening and is in contact with the third insulating layer; and
a sealing material over the first insulating layer,
wherein the source electrode or the drain electrode covers a portion of the gate electrode with the first insulating layer therebetween,
wherein the second insulating layer provided with the third opening that reaches the wiring is placed over the wiring,
wherein the sealing material and the third insulating layer are not in contact with each other,
wherein the third insulating layer and the plurality of spacers include the same material, and
the external terminal connection region comprising:
a terminal electrode layer;
a fourth insulating layer; and
a fifth insulating layer over the fourth insulating layer,
wherein the fourth insulating layer and the fifth insulating layer cover an edge portion of the terminal electrode layer,
wherein the fourth insulating layer is formed from a same layer as the second insulating layer, and
wherein the fifth insulating layer is formed from a same layer as the plurality of spacers.
6. The display device according to claim 1 , wherein the first insulating layer is formed by using an inorganic insulating material and the second insulating layer is formed by using an organic insulating material.
7. The display device according to claim 2 , wherein the first insulating layer is formed by using an inorganic insulating material and the second insulating layer is formed by using an organic insulating material.
8. The display device according to claim 5 , wherein the first insulating layer is formed by using an inorganic insulating material and the second insulating layer is formed by using an organic insulating material.
9. The display device according to claim 1 , wherein the second insulating layer has a stacked structure of two layers.
10. The display device according to claim 2 , wherein the second insulating layer has a stacked structure of two layers.
11. The display device according to claim 5 , wherein the second insulating layer has a stacked structure of two layers.
12. The display device according to claim 1 , wherein the second insulating layer has a stacked structure of two layers of an inorganic insulating material and an organic insulating material.
13. The display device according to claim 2 , wherein the second insulating layer has a stacked structure of two layers of an inorganic insulating material and an organic insulating material.
14. The display device according to claim 5 , wherein the second insulating layer has a stacked structure of two layers of an inorganic insulating material and an organic insulating material.