Semiconductor component having a stack of semiconductor chips and method for producing the same
A semiconductor component including a stack of semiconductor chips, the semiconductor chips being fixed cohesively one on top of another, is disclosed. The contact areas of the semiconductor chips are led as far as the edges of the semiconductor chips and conductor portions extend at least from an upper edge to a lower edge of the edge sides of the semiconductor chips in order to electrically connect the contact area of the stacked semiconductor chips to one another.
1. A method for producing a semiconductor component comprising a stack of semiconductor chips, the method comprising:
producing semiconductor chips with contact areas extending as far as the edges of the semiconductor chip;
cohesively fixing the semiconductor chips one above another to form a semiconductor stack;
encapsulating the semiconductor stack with a layer made of a plastic resist which is filled with nanoparticles; and
patterning the layer to form interconnect sections between the contact areas of the semiconductor chips stacked one on top of another.
2. The method as claimed in claim 1 , comprising spraying on the layer made of plastic resist for encapsulating the semiconductor stack.
3. The method as claimed in claim 1 , comprising dipping the semiconductor stack, for encapsulation with a layer made of plastic resist, into a bath of nanoparticle-filled plastic resist.
4. The method as claimed in claim 1 , comprising effecting a laser removal method for patterning the nanoparticle-filled plastic resist to form interconnect sections.
5. The method as claimed in claim 1 , comprising carrying out a photolithography method for patterning the nanoparticle-filled layer made of plastic resist to form interconnect sections.
6. The method as claimed in claim 1 , comprising applying the interconnect sections to the semiconductor stack selectively by precision injection techniques.
7. The method as claimed in claim 1 , comprising applying multilayer interconnect sections in alternation with insulation layers to the semiconductor stack.