Biochip having image sensor with back side illumination photodiode
A biochip having an image sensor with a back side illumination photodiode structure includes: a biochip layer; and an image sensor layer attached to one surface of the biochip layer and configured to sense light with biochemical reaction information, which is emitted from the biochip layer, wherein the image sensor layer includes a plurality of light sensing parts which receive the light directed toward a back side of a wafer.
1. A biochip having an image sensor with a back side illumination photodiode structure, comprising:
a biochip layer; and
an image sensor layer attached to and disposed below the biochip layer and configured to sense light with biochemical reaction information, which is emitted from the biochip layer,
wherein the image sensor layer includes a plurality of light sensing parts which receive the light directed toward a back side of a wafer, and wherein the light sensing parts comprise a plurality of back side illumination photodiodes which are formed in an epitaxial layer of the wafer; and
wherein an interlayer dielectric is formed under the epitaxial layer, and a plurality of metal wiring lines are formed in the interlayer dielectric.
2. The biochip according to claim 1 ,
wherein the biochip layer includes a plurality of reaction regions which have shapes of grooves, and
wherein each of the reaction regions has a target sample in an upper portion thereof and a reference sample in a lower portion thereof.
3. The biochip according to claim 2 , wherein the target sample includes a luminescent material or a fluorescent material.
4. The biochip according to claim 2 , wherein the reference sample uses an antigen material when a biochemical reaction is an antigen-antibody reaction, and uses a gene which is genetically engineered to be capable of complementary binding, when a biochemical reaction is a complementary binding of DNA bases.
5. The biochip according to claim 1 , wherein light sensed by the back side illumination photodiodes is outputted as electrical signals, and the electrical signals are processed by a signal processing unit.
6. The biochip according to claim 5 , wherein the signal processing unit comprises an ISP (image signal processor) which is provided in the image sensor layer.
7. The biochip according to claim 1 , wherein an upper portion of the epitaxial layer includes optical filters and micro lenses which are formed over the optical filters.