Semiconductor device
The present teachings provide a semiconductor device comprising: an IGBT element region, a diode element region and a boundary region provided between the IGBT element region and the diode element region are formed in one semiconductor substrate. The boundary region comprises a second conductivity type first diffusion region, a first conductivity type second diffusion region, and a second conductivity type third diffusion region. A first drift region of the IGBT element region contiguously contacts the first diffusion region of the boundary region, and a second drift region of the diode element region contiguously contacts the first diffusion region of the boundary region. A first body region of the IGBT element region contiguously contacts the second diffusion region of the boundary region, and a second body region of the diode element region contiguously contacts the second diffusion region of the boundary region.
1. A semiconductor device comprising:
an IGBT element region, a diode element region, and a boundary region between the IGBT element region and the diode element region, which are formed in one semiconductor substrate, wherein
the IGBT element region comprises:
a first conductivity type collector region,
a second conductivity type first drift region formed on an upper surface side of the semiconductor substrate relative to the collector region,
a first conductivity type first body region formed on the upper surface side of the semiconductor substrate relative to the first drift region,
a second conductivity type emitter region formed on an upper surface side of the first body region,
a second conductivity type carrier accumulation region formed in the first body region and separated from both of the first drift region and the emitter region by the first body region, and
a trench gate penetrating the first body region from the upper surface side of the semiconductor substrate and reaching the first drift region,
the diode element region comprises:
a second conductivity type cathode region,
a second conductivity type second drift region formed on the upper surface side of the semiconductor substrate relative to the cathode region, and
a first conductivity type second body region formed on the upper surface side of the semiconductor substrate relative to the second drift region,
the boundary region comprises:
a second conductivity type first diffusion region,
a first conductivity type second diffusion region formed on the upper surface side of the semiconductor substrate relative to the first diffusion region, and
a second conductivity type third diffusion region formed in the second diffusion region and separated from the first diffusion region by the second diffusion region,
the first drift region of the IGBT element region contiguously contacts the first diffusion region of the boundary region,
the second drift region of the diode element region contiguously contacts the first diffusion region of the boundary region,
the first body region of the IGBT element region contiguously contacts the second diffusion region of the boundary region, and
the second body region of the diode element region contiguously contacts the second diffusion region of the boundary region.
2. The semiconductor device according to claim 1 , wherein
the third diffusion region of the boundary region extends to contiguously contact the carrier accumulation region of the IGBT element region.
3. The semiconductor device according to claim 2 , wherein
the third diffusion region of the boundary region and the carrier accumulation region of the IGBT element region are formed as one semiconductor layer.