IP Library Granted Patent US 8,368,050
Granted Patent B2
US 8,368,050 · App. 12/864,210 · Granted Feb 5, 2013

Plasmon enhanced light-emitting diodes

Inventors: David A. Fattal (Mountain View, CA); Michael Renne Ty Tan (Menlo Park, CA)
Assignee: Hewlett-Packard Development Company, L.P.
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Quick Facts
Patent No.
US 8,368,050
App. No.
12/864,210
Filed
Jul 22, 2010
Granted
Feb 5, 2013
Kind
B2
Art Unit
2893
USPC
257/13
Abstract

Embodiments of the present invention are directed to light-emitting diodes. In one embodiment of the present invention, a light-emitting diode comprises at least one quantum well sandwiched between a first intrinsic semiconductor layer and a second semiconductor layer. An n-type heterostructure is disposed on a surface of the first intrinsic semiconductor layer, and a p-type heterostructure is disposed on a surface of the second intrinsic semiconductor layer opposite the n-type semiconductor heterostructure. The diode also includes a metal structure disposed on a surface of the light-emitting diode. Surface plasmon polaritons formed along the interface between the metal-structure and the light-emitting diode surface extend into the at least one quantum well increasing the spontaneous emission rate of the transverse magnetic field component of electromagnetic radiation emitted from the at least one quantum well. In certain embodiments, the electromagnetic radiation can be modulated at a rate of about 10 Gb/s or faster.

Claims (28)

1. A light-emitting diode comprising:

at least one quantum well sandwiched between a first intrinsic semiconductor layer and a second intrinsic semiconductor layer;

a first heterostructure disposed on a surface of the first intrinsic semiconductor layer;

a second heterostructure disposed on a surface of the second intrinsic semiconductor layer, wherein the second heterostructure is located opposite the first heterostructure; and

a metal structure disposed on a surface of the light-emitting diode, wherein electron-plasma oscillations of surface plasmon polaritons formed along the interface between the metal structure and the surface of the light-emitting diode extend into the at least one quantum well increasing the spontaneous emission rate of the transverse magnetic field component of electromagnetic radiation emitted from the at least one quantum well via the Purcell effect,

wherein the second heterostructure comprises: a first compositionally graded semiconductor layer disposed on the surface of the second intrinsic semiconductor layer;

a first intermediate semiconductor layer disposed on a surface of the first compositionally graded semiconductor layer; and

a second compositionally graded semiconductor layer disposed on a surface of the first intermediate semiconductor layer.

2. The light-emitting diode of claim 1 wherein the at least one quantum well further comprises a tensile strained intrinsic semiconductor.

3. The light-emitting diode of claim 1 wherein the at least one quantum well further comprises a thickness of about 10 nm.

4. The light-emitting diode of claim 1 wherein the at least one quantum well further comprises GaAs 1-x P x , where x ranges from 0 to 1.

5. The light-emitting diode of claim 1 wherein the first intrinsic semiconductor layer and the second intrinsic semiconductor layer further comprise intrinsic Al x Ga 1-x As, where x ranges from 0 to 1.

6. The light-emitting diode of claim 1 wherein the first heterostructure further comprises:

a first semiconductor layer disposed on the surface of the first intrinsic semiconductor layer; and

a second semiconductor layer sandwiched between the metal structure and the first semiconductor layer, wherein the first semiconductor layer has a relatively lower electronic energy band gap than the second semiconductor layer.

7. The light-emitting diode of claim 6 wherein the first semiconductor layer further comprises an n-type Al x Ga 1-x As layer having an n-type dopant concentration of about 10 18 and x ranges from about 0 to about 1, and the second semiconductor layer further comprises an n-type InGaP layer having a n-type dopant concentration of about 2×10 18 .

8. The light-emitting diode of claim 6 wherein the first semiconductor layer further comprises an p-type Al x Ga 1-x As layer having a p-type dopant concentration of about 10 18 and x ranges from about 0 to about 1, and the second semiconductor layer further comprises an p-type InGaP layer having a p-type dopant concentration of about 2×10 18 .

9. The light-emitting diode of claim 1 wherein the second heterostructure further comprises: a second intermediate semiconductor layer disposed on a surface of the second compositionally graded semiconductor layer; and a third semiconductor layer disposed on a surface of the second intermediate semiconductor layer.

10. The light-emitting diode of claim 9 wherein the first intermediate semiconductor layer further comprises Al x Ga 1-x As having a p-type dopant concentration of about 5×10 17 and x ranges from about 0 to about 1, the second intermediate semiconductor layer further comprises Al x Ga 1-x As having a p-type dopant concentration of about 2×10 18 and x ranges from about 0 to about 1, and the third semiconductor layer further comprises InGaP having a p-type dopant concentration of about 2×10 18 .

11. The light-emitting diode of claim 9 wherein the first intermediate semiconductor layer further comprises Al x Ga 1-x As having an n-type dopant concentration of about 5×10 17 and x ranges from about 0 to about 1, the second intermediate semiconductor layer further comprises Al x Ga 1-x As having an n-type dopant concentration of about 2×10 18 and x ranges from about 0 to about 1, and the third semiconductor layer further comprises InGaP having an n-type dopant concentration of about 2×10 18 .

12. The light-emitting diode of claim 1 wherein the first and second compositionally graded semiconductor layers further comprise Al x Ga 1-x As, where x ranges from about 0 to 1.

13. The light-emitting diode of claim 1 wherein the first and second compositionally graded semiconductor layers have a relatively larger electronic energy band gap than the first and second intermediate semiconductor layers.

14. The light-emitting diode of claim 1 further comprises a layer of indium tin oxide disposed on a surface of the light-emitting diode opposite the metal structure.

15. The light-emitting diode of claim 1 wherein the metal structure further comprises a metal supporting surface plasmon, the metal supporting surface plasmon is one selected from the group consisting of: gold; silver; aluminum; platinum; copper; and an alloy thereof.

16. The light-emitting diode of claim 1 wherein the metal structure further comprises a grating.

17. The light-emitting diode of claim 1 wherein the metal structure further comprises an outer roughened surface.

18. The light-emitting diode of claim 1 further comprises a modulation speed of about 10 Gb/s or faster and a Purcell factor on the order of about 10.

19. The light-emitting diode of claim 1 wherein the at least one quantum well is about 20-30 nm away from the interface.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 9, 2015
From: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
To: HEWLETT PACKARD ENTERPRISE DEVELOPMENT LP
Reel/Frame 037079/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 15, 2010
From: FATTAL, DAVID A.; TAN, MICHAEL RENNE TY
To: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
Reel/Frame 025501/0577 →
Continuity (1)
Related Publication 20100301307A1 · Dec 2, 2010