Fiber laser substrate processing
Embodiments of the present invention pertain to substrate processing equipment and methods incorporating light sources which provide independent control of light pulse duration, shape and repetition rate. Embodiments further provide rapid increases and decreases in intensity of illumination.
1. A substrate processing system comprising:
a fiber bundle laser comprising a plurality of fiber lasers each configured to generate optical pulses to heat a portion of a surface of a semiconductor substrate to at least 200° C., each of the plurality of fiber lasers having a laser cavity comprising an optical fiber with a doped core to generate the optical pulses and an undoped optical fiber to transmit the optical pulses from the doped core to the surface of the semiconductor substrate;
wherein the optical pulses comprise one or more wavelengths of light having independently selectable pulse duration, shape, and repetition rate; and
wherein the portion of the surface has an area greater than ten square millimeters.
2. The substrate processing system of claim 1 wherein the optical pulses promote chemical reactions between process gases and the semiconductor substrate which result in the formation of a film on a surface of the semiconductor substrate.
3. The substrate processing system of claim 1 wherein the optical pulses activate dopants in the semiconductor substrate.
4. The substrate processing system of claim 1 wherein the optical pulses anneal the semiconductor substrate.
5. The substrate processing system of claim 1 wherein the pulse duration is between about 100 ns and about 100 μs.
6. The substrate processing system of claim 1 wherein the optical pulses modify the semiconductor substrate by heating the semiconductor substrate.
7. The substrate processing system of claim 1 wherein the optical pulses modify the semiconductor substrate by diffusing atoms in the semiconductor substrate.
8. The substrate processing system of claim 1 wherein the repetition rate is less than about 1 MHz.
9. The substrate processing system of claim 1 wherein the portion of the surface is greater than one hundred square millimeters.
10. The substrate processing system of claim 1 further comprising an optical pyrometry assembly to monitor radiation from the portion of the surface near a wavelength different from the one or more wavelengths of the one or more fiber lasers.
11. A substrate processing system comprising:
a substrate support assembly that supports a semiconductor substrate disposed within a processing chamber;
an optical assembly comprising:
a fiber bundle laser comprising a plurality of fiber lasers each configured to generate optical pulses of one or more wavelengths to heat a portion of a surface of the semiconductor substrate to at least 200° C., each of the plurality of fiber lasers having a laser cavity comprising an optical fiber with a doped core to generate the optical pulses and an undoped optical fiber to transmit the optical pulses from the doped core to the surface of the semiconductor substrate, wherein the optical pulses comprise one or more wavelengths of light having independently selectable pulse duration, shape, and repetition rate, and the portion of the surface has an area greater than ten square millimeters.
12. The substrate processing system of claim 11 wherein the optical assembly exposes one portion of the semiconductor substrate at a time.
13. The substrate processing system of claim 11 wherein the substrate support assembly is moveable relative to the one or more fiber lasers.
14. The substrate processing system of claim 11 wherein the one or more fiber lasers is moveable relative to the substrate support assembly.
15. A method of treating a semiconductor substrate comprising:
independently selecting a pulse duration, shape, and repetition rate of at least one optical pulse of light that promotes a surface process;
heating to at least 200° C. a first portion of a surface of a semiconductor substrate with the at least one optical pulse of light to promote the surface process;
wherein the at least one optical pulse of light comprises one or more fiber laser wavelengths emitted from an output of a fiber laser assembly, the fiber laser assembly including a fiber bundle laser comprising a plurality of fiber lasers each having a laser cavity comprising an optical fiber with a doped core to generate the at least one optical pulse of light and an undoped optical fiber to transmit the at least one optical pulse of light from the doped core to the surface of the semiconductor substrate; and
wherein the portion of the surface has an area greater than ten square millimeters.
16. The method of claim 15 further comprising:
moving the semiconductor substrate;
illuminating a second portion of the surface of the semiconductor substrate.
17. The method of claim 15 further comprising:
receiving an emitted light from the first portion of a surface of the semiconductor substrate;
determining an intensity of the emitted light near a process monitoring wavelength, wherein the process monitoring wavelength is different from the one or more fiber laser wavelengths.