Method to form lateral pad on edge of wafer
Embodiments are directed to an apparatus and fabrication method to form pad arrays on the edge of a substrate wafer substrate. Embodiments of the invention make it possible for surface mount devices to be bonded vertically (i.e. on their side) using standard semiconductor assembly processes.
1. A component, comprising:
a dielectric wafer portion comprising a plurality of metal filled trenches;
a plurality of metal traces on the dielectric wafer portion crossing over the plurality of metal filled trenches;
a lateral side of the component including an exposed cross-section of the metal filled trench, wherein the cross-section of each metal filled trench is a bonding pad when the component is turned on its side; and
a glass layer on the dielectric wafer portion wherein the metal filled trench bonding pad is sandwiched beneath and between the glass layer and the dielectric wafer portion.
2. The component as recited in claim 1 further comprising:
a plurality of said dielectric wafers stacked one on top of the other, wherein the cross-sections of the metal filled trenches comprise a bonding pad array.
3. The component as recited in claim 1 wherein the component is vertically flip-chip bonded to a substrate using the bonding pads.
4. The component as recited in claim 1 wherein the exposed cross-section of the metal filled trench has a roughness Ra of about 0.2 um.
5. A component, comprising:
a dielectric wafer portion comprising a plurality of metal filled trenches;
a plurality of metal traces on the dielectric wafer portion crossing over the plurality of metal filled trenches;
a lateral side of the component including an exposed cross-section of the metal filled trench, wherein the cross-section of each metal filled trench is a bonding pad when the component is turned on its side; and
a plastic layer on the dielectric wafer portion wherein the metal filled trench bonding pad is sandwiched beneath and between the plastic layer and the dielectric wafer portion.
6. The component as recited in claim 5 further comprising:
a plurality of said dielectric wafers stacked one on top of the other, wherein the cross-sections of the metal filled trenches comprise a bonding pad array.
7. The component as recited in claim 5 wherein the component is vertically flip-chip bonded to a substrate using the bonding pads.
8. The component as recited in claim 5 wherein the exposed cross-section of the metal filled trench has a roughness Ra of about 0.2 um.