Oxide sintered body, target, transparent conductive film obtained by using the same, and transparent conductive substrate
An oxide sintered body having zinc oxide as a main component and containing magnesium, and a transparent conductive substrate are provided, and an oxide sintered body having zinc oxide and magnesium, wherein content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Mg); an oxide sintered body having zinc oxide, magnesium, gallium and/or aluminum, wherein content of gallium and/or aluminum is over 0 and equal to or lower than 0.09 as atom number ratio of (Ga+Al)/(Zn+Ga+Al), and content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Ga+Al+Mg); a target obtained by processing these oxide sintered bodies; and a transparent conductive film formed on a substrate by a sputtering method or an ion plating method, by using this target.
1. An oxide sintered body, characterized in that
the body comprises zinc oxide, magnesium, gallium and/or aluminum, and content of gallium and/or aluminum is over 0 and equal to or lower than 0.09 as atom number ratio of (Ga+Al)/(Zn+Ga+Al), that
content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Ga+Al+Mg), and that
the body lacks a magnesium oxide phase.
2. The oxide sintered body according to claim 1 , characterized in that content of magnesium is from 0.05 to 0.18 as atom number ratio of Mg/(Zn+Ga+Al+Mg).
3. The oxide sintered body according to claim 1 , characterized in that content of gallium and/or aluminum is from 0.01 to 0.08 as atom number ratio of (Ga+Al)/(Zn+Ga+Al).
4. The oxide sintered body according to claim 1 , characterized in that content of gallium and/or aluminum is from 0.035 to 0.08 as atom number ratio of (Ga+Al)/(Zn+Ga+Al), and content of magnesium is from 0.098 to 0.18 as atom number ratio of Mg/(Zn+Ga+Al+Mg).
5. The oxide sintered body according to claim 1 , characterized in that peak intensity ratio by X-ray diffraction measurement represented by the following expression (A), is equal to or lower than 15%:
I[MgGa 2 O 4 (311)+MgAl 2 O 4 (311)]/I[ZnO(101)]×100 (%) (A)
wherein I[MgGa 2 O 4 (311)+MgAl 2 O 4 (311)] represents a sum of (311) peak intensity of a complex oxide MgGa 2 O 4 phase having a rock salt structure of cubic crystal, and (311) peak intensity of a MgAl 2 O 4 phase, and I[ZnO(101)] represents (101) peak intensity of an zinc oxide phase having a wurtzite structure of hexagonal crystal.
6. The oxide sintered body according to claim 1 , characterized in that the specific resistance is equal to or lower than 5 kΩcm.
7. The oxide sintered body according to claim 1 , characterized in that the oxide sintered body is obtained by formation and sintering by using a hot press method.
8. The oxide sintered body according to claim 1 , wherein an average particle size of raw material powders comprised in the oxide sintered body is equal to or smaller than 3 μm.
9. A target obtained by processing the oxide sintered body according to claim 1 .
10. The target according to claim 9 , characterized in that density thereof is equal to or higher than 5.0 g/cm 3 , and it is used in a sputtering method.
11. The target according to claim 9 , characterized in that the density thereof is from 3.5 to 4.5 g/cm 3 , and it is used in an ion plating method.
12. A transparent conductive film formed on a substrate by a sputtering method or an ion plating method, by using the target according to claim 9 .
13. The transparent conductive film according to claim 12 , characterized in that comprises zinc oxide, magnesium, gallium and/or aluminum, and content of gallium and/or aluminum is over 0 and equal to or lower than 0.09 as atom number ratio of (Ga+Al)/(Zn+Ga+Al), and content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Ga+Al+Mg).
14. The transparent conductive film according to claim 13 , characterized in that content of magnesium is from 0.05 to 0.18 as atom number ratio of Mg/(Zn+Ga+Al+Mg).
15. The transparent conductive film according to claim 13 , characterized in that content of gallium and/or aluminum is from 0.01 to 0.08 as atom number ratio of (Ga+Al)/(Zn+Ga+Al).
16. The transparent conductive film according to claim 13 , characterized in that content of gallium and/or aluminum is from 0.035 to 0.08 as atom number ratio of (Ga+Al)/(Zn+Ga+Al), and content of magnesium is from 0.098 to 0.18 as atom number ratio of Mg/(Zn+Ga+Al+Mg).
17. The transparent conductive film according to claim 12 , characterized in that comprises mainly a zinc oxide phase having a wurtzite structure of hexagonal crystal, and peak intensity ratio by X-ray diffraction measurement represented by the following expression (B) is equal to or more than 50%: I[ZnO(002)]/(I[ZnO(002)]+I[ZnO(100)])×100 (%) (B) (wherein I[ZnO(002)] represents (002) peak intensity of the zinc oxide phase having a wurtzite structure of hexagonal crystal, and l[ZnO(100)] represents (100) peak intensity of the zinc oxide phase having a wurtzite structure of hexagonal crystal).
18. The transparent conductive film according to claim 12 , characterized in that the zinc oxide phase having a rock salt structure of cubic crystal is not contained substantially.
19. A transparent conductive substrate, characterized in that provides a transparent substrate and the transparent conductive film according to claim 12 formed on one surface or both surfaces of said transparent substrate, and said transparent substrate is any of a glass plate, a quartz plate, a resin plate or a resin film whose one surface or both surfaces is covered with a gas barrier film, or a resin plate or a resin film inserted with a gas barrier film inside thereof.
20. The transparent conductive substrate according to claim 19 , characterized in that said gas barrier film is at least one selected from a silicon oxide film, a silicon oxynitride film, a magnesium aluminate film, a tin oxide film and a diamond-like carbon film.
21. The transparent conductive substrate according to claim 19 , characterized in that said resin plate or resin film is made of polyethyleneterephtharate, polyethersulfone, polyarylate, polycarbonate, or a laminated structure body whose surface is covered with an acrylic organic substance.