Deflecting mirror for deflecting and scanning light beam
The deflecting mirror includes a fixed base member; a mirror having a reflection surface; a support member swingablly supporting the mirror; a pair of driving beam members, each having a first end connected with the fixed base member and a second end connected with the support member to support the support member from both sides; and a piezoelectric member fixed to each driving beam member and extending from the first or second end of each driving beam member while having length not longer than about half the length of the driving beam member. The piezoelectric member and the driving beam members constitute piezoelectric unimorph or bimorph structure. By applying voltage to the piezoelectric member, the driving beam members are driven at the same time in the same direction, thereby vibrating the support member in a direction perpendicular to the reflection surface of the mirror, resulting in swinging of the mirror.
1. A deflecting mirror comprising:
a fixed base member;
a mirror having a reflection surface;
a support member configured to swingablly support the mirror;
a pair of driving beam members, each of which has a first end connected with the fixed base member and a second end connected with the support member to support the support member from both sides thereof; and
a piezoelectric member fixed to each of the pair of driving beam members and including first and second piezoelectric members, wherein the first piezoelectric member extends from the first end of each driving beam member while having substantially one third or two thirds of a length of the driving beam member, and the second piezoelectric member extends from the second end of each driving beam member while having substantially two thirds or one third of the length of the driving beam member,
wherein the piezoelectric member and the pair of driving beam members constitute a piezoelectric unimorph or bimorph structure, and
wherein when a voltage is applied to the piezoelectric member, the pair of driving beam members is driven at a same time in opposite directions, thereby applying a moment to the support member, resulting in swinging of the mirror.
2. The deflecting mirror according to claim 1 , wherein voltages having different polarities or periodically changed voltages having different phases are applied to the first and second piezoelectric members.
3. The deflecting mirror according to claim 1 , wherein a voltage is applied to the first or second piezoelectric member to drive the pair of driving beam members and to swing the mirror, and wherein a voltage generated by deformation of the other piezoelectric member, to which a voltage is not applied, is detected to detect movement of the mirror.
4. The deflecting mirror according to claim 1 , wherein the first and second piezoelectric members are wired independently of each other.
5. The deflecting mirror according to claim 4 , wherein the first and second piezoelectric members are polarized in a same direction, and periodically changed voltages having different phases are applied to the first and second piezoelectric members.
6. The deflecting mirror according to claim 4 , wherein the first and second piezoelectric members are polarized in opposite directions while the first piezoelectric members of the pair of driving beam members are polarized in opposite directions and the second piezoelectric members of the pair of driving beam members are also polarized in opposite directions, and a same periodically changed voltage is applied to the first-mentioned and second piezoelectric members.
7. The deflecting mirror according to claim 4 , wherein a voltage is applied to the first or second piezoelectric member to drive the pair of driving beam members and to swing the mirror, and wherein a voltage generated by deformation of the other piezoelectric member, to which a voltage is not applied, is detected to detect movement of the mirror.