IP Library › Granted Patent US 8,405,146
Granted Patent B2
US 8,405,146 · App. 12/773,580 · Granted Mar 26, 2013

Component arrangement including a MOS transistor having a field electrode

Inventors: Armin Willmeroth (Augsburg, DE); Franz Hirler (Isen, DE)
Assignee: Infineon Technologies Austria AG
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Quick Facts
Patent No.
US 8,405,146
App. No.
12/773,580
Granted
Mar 26, 2013
Kind
B2
Abstract

A component arrangement including a MOS transistor having a field electrode is disclosed. One embodiment includes a gate electrode, a drift zone and a field electrode, arranged adjacent to the drift zone and dielectrically insulated from the drift zone by a dielectric layer a charging circuit, having a rectifier element connected between the gate electrode and the field electrode.

Claims (28)

1. A component arrangement comprising:

a MOS transistor having a gate electrode;

a drift zone;

a field electrode, arranged adjacent to the drift zone and dielectrically insulated from the drift zone by a dielectric layer;

a charging circuit, having a rectifier element connected between the gate electrode and the field electrode,

wherein the MOS transistor is integrated in a semiconductor body, and the gate electrode and the field electrode are arranged in a common trench in the semiconductor body;

wherein the MOS transistor has a source zone, and the charging circuit has a capacitive storage element connected between the field electrode and the source zone; and

wherein the capacitive storage element is arranged in the trench.

2. The component arrangement of claim 1 , wherein the capacitive storage element has a first and a second electrode and a storage dielectric arranged between the first and second electrode.

3. The component arrangement of claim 2 , wherein the first electrode of the capacitive storage element is formed by the field electrode.

4. The component arrangement of claim 3 , wherein the second electrode of the capacitive storage element is arranged within the trench between the gate electrode and the field electrode.

5. The component arrangement of claim 1 , wherein the MOS transistor is a MOSFET.

6. The component arrangement of claim 1 , comprising wherein the MOS transistor is realized as an IGBT.

7. The component arrangement of claim 1 , in which the MOS transistor is realized as a vertical transistor, in which a current flow direction in the drift zone runs in a vertical direction of the semiconductor body.

8. The component arrangement of claim 1 , comprising wherein the MOS transistor is a lateral transistor, a current flow direction in the drift zone runs in a lateral direction of the semiconductor body.

9. The component arrangement of claim 1 , wherein the rectifier element is polarized in such a way that the field electrode, when the component is driven in the on state, is charged with a charge suitable for forming an accumulation channel in the drift zone.

10. An integrated circuit comprising:

a semiconductor body;

a MOS transistor having a gate electrode;

a drift zone;

a field electrode, arranged adjacent to the drift zone and dielectrically insulated from the drift zone by a dielectric layer;

a charging circuit, having a rectifier element connected between the gate electrode and the field electrode;

one or more additional electrical components;

wherein the MOS transistor is integrated in the semiconductor body, and the gate electrode and the field electrode are arranged in a common trench in the semiconductor body;

wherein the MOS transistor has a source zone, and the charging circuit has a capacitive storage element connected between the field electrode and the source zone; and

wherein the capacitive storage element is arranged in the trench.

11. The integrated circuit of claim 10 , wherein the capacitive storage element has a first and a second electrode and a storage dielectric arranged between the first and second electrode.

12. The integrated circuit of claim 11 , wherein the first electrode of the capacitive storage element is formed by the field electrode.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 10, 2010
From: WILLMEROTH, ARMIN; HIRLER, FRANZ, DR.
To: INFINEON TECHNOLOGIES AUSTRIA AG
Reel/Frame 024357/0079 →
Priority Claims (1)
DE 10 2007 004 323 · Jan 29, 2007 · national
Continuity (2)
Division 12021709 · Jan 9, 2008
Related Publication 20100213506A1 · Aug 26, 2010