Composite piezoelectric body including a piezoelectric ceramic and an organic polymer material containing air bubbles, method for producing said composite piezoelectric body, and composite piezoelectric element using said composite piezoelectric body
[Object] There has been a need for a composite piezoelectric body and a composite piezoelectric element using the composite piezoelectric body which does not cause electrode defects, disconnection, and peeling even if the piezoelectric body is subjected to fine-pitch processing. [Solution] A composite piezoelectric body of the present invention includes a piezoelectric ceramic and an organic polymer material containing air bubbles mixed therein, wherein among surfaces of the piezoelectric ceramic and the organic polymer material on which an electrode is to be formed, an insulating layer is formed on the entire or a portion of the surface of the organic polymer material on which the electrode is to be formed.
1. A composite piezoelectric body comprising a piezoelectric ceramic and an organic polymer material containing air bubbles mixed therein which form depression holes on a surface of the organic polymer material,
wherein among surfaces of the piezoelectric ceramic and the organic polymer material on which an electrode is to be formed, an insulating layer is disposed on the entire or a portion of the surface of the organic polymer material on which the electrode is to be formed, the insulating layer at least substantially filling the depression holes present in the surface of the organic polymer material.
2. The composite piezoelectric body according to claim 1 , wherein the thickness of the insulating layer is 50 μm or less.
3. The composite piezoelectric body according to claim 1 , wherein the average bulk density of the organic polymer material and the insulating layer is 0.6 g/cm 3 or less.
4. The composite piezoelectric body according to claim 1 , wherein the insulating layer is composed of an epoxy resin.
5. A composite piezoelectric element comprising the composite piezoelectric body according to claim 1 and an electrode formed thereon.
6. A composite piezoelectric element comprising the composite piezoelectric body according to claim 2 and an electrode formed thereon.
7. A composite piezoelectric element comprising the composite piezoelectric body according to claim 3 and an electrode formed thereon.
8. A composite piezoelectric element comprising the composite piezoelectric body according to claim 4 and an electrode formed thereon.
9. A method for producing a composite piezoelectric body comprising a piezoelectric ceramic and an organic polymer material containing air bubbles mixed therein which form depression holes on a surface of the organic polymer material,
wherein among surfaces of the piezoelectric ceramic and the organic polymer material on which an electrode is to be formed, an insulating layer is disposed on the entire or a portion of the surface of the organic polymer material on which the electrode is to be formed, the method comprising the steps of:
forming a plurality of grooves in a ceramic by machining;
filling the grooves with a resin which evaporates at a predetermined temperature;
forming the organic polymer material containing air bubbles mixed therein by heat treatment at a temperature where the resin evaporates, the air bubbles forming depression holes on a surface of the organic polymer material; and
forming the electrode,
wherein the method further comprises a step of forming the insulating layer on the entire or a portion of a surface of the organic polymer material on which the electrode is to be formed, the insulating layer at least substantially filling the depression holes present on the surface of the organic polymer material.
10. The method for producing a composite piezoelectric body according to claim 9 , comprising an electroless plating step as the step of forming the electrode.
11. The method for producing a composite piezoelectric body according to claim 10 , wherein the electroless plating step is performed at 70° C. or less.