Vapor based combinatorial processing
A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.
1. A chamber for combinatorially processing a substrate, comprising; a showerhead in flow communication with a fluid source, the showerhead having multiple inlets for receiving a plurality of fluid flows, each fluid flow having different constituent components, the showerhead further comprising a fluid separator for maintaining segregation of the plurality of fluid flows; a support pedestal; a peripheral flow channel surrounding the support pedestal; a pump channel connected to a vacuum source, wherein the dimensions of the peripheral flow channel are defined to provide a conductance of the plurality of fluid flows passing a periphery of the support pedestal such that a conductance of the plurality of fluid flows through the pump channel is at least 5 times greater than the conductance of the plurality of fluid flows through the peripheral flow channel, and thereby facilitating uniform axisymmetric flow of the plurality of fluid flows above the support pedestal.
2. The chamber of claim 1 , further comprising: a fluid supply system coupled to the chamber, wherein the fluid supply system in cooperation with a pressure control system equalizes pressures of the plurality of fluid flows provided to the showerhead, such that the segregation of the fluid flows is maintained.
3. The system of claim 1 wherein an inlet to the vacuum source is located below the support pedestal.
4. The system of claim 1 wherein an inlet to the vacuum source is located proximate to an edge of the support pedestal.
5. The system of claim 1 , wherein the fluid separator extends radially outward across a surface of the showerhead.
6. The system of claim 1 , wherein the fluid separator is one of a wall within the showerhead, a wall extending into the chamber from the showerhead, concentric ports, or a set of radially aligned injection ports.
7. The system of claim 6 , wherein the wall within the showerhead provides one of complete physical separation of sectors within the showerhead, or partial physical separation within the showerhead.
8. A semiconductor processing system, comprising: a fluid supply, the fluid supply comprising a plurality of constituent components, the constituent components comprising carrier fluids and precursors, the fluid supply stores and delivers different mixtures of the plurality of constituent components; and a chamber attached to a central frame about which multiple other chambers are oriented, the chamber comprising: a showerhead in flow communication with a fluid source, the showerhead having multiple inlets for receiving a plurality of fluid flows, each fluid flow having different constituent components, the showerhead further comprising a fluid separator for maintaining segregation of the plurality of fluid flows; a support pedestal; a peripheral flow channel surrounding the support pedestal; a pump channel connected to a vacuum source, wherein the dimensions of the peripheral flow channel are defined to provide a conductance of the plurality of fluid flows passing a periphery of the support pedestal such that a conductance of the plurality of fluid flows through the pump channel is at least 5 times greater than a conductance of the plurality of fluid flows through the peripheral flow channel, and thereby facilitating uniform axisymmetric flow of the plurality of fluid flows above the support pedestal.
9. The semiconductor processing system of claim 8 , wherein one of the other chambers is a physical vapor deposition (PVD) module.
10. The semiconductor processing system of claim 8 , wherein the chamber is in flow communication with a vacuum source, wherein an inlet to the vacuum source is separate from the showerhead.
11. The semiconductor processing system of claim 10 wherein a conductance of the inlet to the vacuum source is greater than a conductance of a peripheral flow channel defined around a periphery of the support pedestal.
12. The semiconductor processing system of claim 8 , wherein the showerhead comprises a fluid separator extending radially outward across a surface of the showerhead.
13. The semiconductor processing system of claim 12 , wherein the fluid separator is a set of injection ports.