Semiconductor memory device and method for manufacturing same
According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a memory film, and a SiGe film. The stacked body includes a plurality of conductive layers and a plurality of insulating layers alternately stacked above the substrate. The memory film includes a charge storage film. The memory film is provided on a sidewall of a memory hole punched through the stacked body. The SiGe film is provided inside the memory film in the memory hole.
1. A semiconductor memory device comprising:
a substrate;
a stacked body including a plurality of conductive layers and a plurality of insulating layers alternately stacked above the substrate;
a memory film including a charge storage film and provided on a sidewall of a memory hole punched through the stacked body; and
a SiGe film provided inside the memory film in the memory hole, the SiGe film having a relatively high Ge concentration on a central axis side of the memory hole.
2. The device according to claim 1 , further comprising:
a silicon oxide film provided on a side surface of the SiGe film on an opposite side to the memory film.
3. The device according to claim 1 , further comprising:
a select gate stacked on the stacked body;
a gate insulating film provided on a side surface of a hole punched through the select gate immediately above the memory hole; and
a channel film provided inside the gate insulating film in the hole.
4. The device according to claim 3 , wherein the channel film is a SiGe film provided integrally with the SiGe film.
5. The device according to claim 3 , wherein the channel film is a silicon film.
6. The device according to claim 5 , wherein the silicon film is in contact with a side surface of an upper end portion of the SiGe film.
7. The device according to claim 5 , wherein the gate insulating film is a silicon nitride film.