IP Library › Granted Patent US 8,415,556
Granted Patent B2
US 8,415,556 · App. 12/643,380 · Granted Apr 9, 2013

Copper delafossite transparent P-type semiconductor thin film devices

Inventors: Kaushal K. Singh (Santa Clara, CA); Omkaram Nalamasu (San Jose, CA); Nety Krishna (Sunnyvale, CA); Michael Snure (Salt Lake City, UT); Ashutosh Tiwari (Sandy, UT)
Assignee: Applied Materials, Inc.
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Quick Facts
Patent No.
US 8,415,556
App. No.
12/643,380
Granted
Apr 9, 2013
Kind
B2
Abstract

Methods for fabrication of copper delafossite materials include a low temperature sol-gel process for synthesizing CuBO 2 powders, and a pulsed laser deposition (PLD) process for forming thin films of CuBO 2 , using targets made of the CuBO 2 powders. The CuBO 2 thin films are optically transparent p-type semiconductor oxide thin films. Devices with CuBO 2 thin films include p-type transparent thin film transistors (TTFT) comprising thin film CuBO 2 as a channel layer and thin film solar cells with CuBO 2 p-layers. Solid state dye sensitized solar cells (SS-DSSC) comprising CuBO 2 in various forms, including “core-shell” and “nano-couple” particles, and methods of manufacture, are also described.

Claims (38)

1. A thin film solar cell comprising:

a substrate;

a copper boron oxide p-layer over said substrate, said copper boron oxide p-layer comprising an optically transparent p-type semiconductor, wherein said optically transparent p-type semiconductor is CuBO 2 copper delafossite;

a thin film of n-type transparent conducting oxide between said substrate and said copper boron oxide p-layer;

an amorphous silicon absorber layer over said copper boron oxide p-layer;

a n-type amorphous silicon layer over said amorphous silicon absorber layer; and

a back contact layer over said n-type amorphous silicon layer.

2. The thin film solar cell as in claim 1 , wherein said copper boron oxide p-layer is a thin film, said thin film having a thickness in the range of 8 to 100 nanometers.

3. The thin film solar cell as in claim 1 , wherein said substrate comprises glass.

4. A thin film solar cell comprising:

a substrate;

a transparent n-layer over said substrate; and

a p-layer between said substrate and said transparent n-layer;

wherein said p-layer comprises an absorber material and a copper boron oxide layer, said copper boron oxide layer comprising an optically transparent p-type semiconductor, wherein said optically transparent p-type semiconductor is CuBO 2 copper delafossite.

5. The thin film solar cell as in claim 4 , wherein said absorber material comprises copper indium gallium selenide.

6. The thin film solar cell as in claim 4 , wherein said copper boron oxide p-layer is a thin film, said thin film having a thickness of 20 nanometers.

7. The thin film solar cell as in claim 4 , wherein said copper boron oxide p-layer is between said absorber material and said transparent n-layer.

8. A thin film solar cell comprising:

a substrate; and

a p-layer over said substrate;

wherein said p-layer comprises a copper boron oxide p-layer and a second layer of p-type material, said copper boron oxide p-layer comprising an optically transparent p-type semiconductor, wherein said optically transparent p-type semiconductor is CuBO 2 copper delafossite, and wherein said second layer of p-type material is selected from the group consisting of a layer of p-type amorphous silicon, a layer of p-type microcrystalline silicon and a layer of p-type microcrystalline silicon carbide.

9. The thin film solar cell as in claim 8 , wherein said second layer of p-type material is said layer of p-type amorphous silicon.

10. The thin film solar cell as in claim 8 , wherein said second layer of p-type material is said layer of p-type microcrystalline silicon.

11. The thin film solar cell as in claim 8 , wherein said second layer of p-type material is said layer of p-type microcrystalline silicon carbide.

12. A thin film solar cell comprising:

a substrate;

a transparent conductive layer over said substrate;

a first copper boron oxide p-layer over said transparent conductive layer, said first copper boron oxide p-layer comprising an optically transparent p-type semiconductor, wherein said optically transparent p-type semiconductor is CuBO 2 copper delafossite;

a first layer of intrinsic semiconductor over said first copper boron oxide p-layer;

a first n-type semiconductor layer over said first layer of intrinsic semiconductor;

a second copper boron oxide p-layer over said first n-type semiconductor layer, said second copper boron oxide p-layer comprising an optically transparent p-type semiconductor, wherein said optically transparent p-type semiconductor is CuBO 2 copper delafossite;

a second layer of intrinsic semiconductor over said second copper boron oxide p-layer;

a second n-type semiconductor layer over said second layer of intrinsic semiconductor; and

a back contact layer over said second n-type semiconductor layer.

13. The thin film solar cell as in claim 12 , wherein said substrate comprises glass.

14. The thin film solar cell as in claim 12 , wherein said first and second copper boron oxide p-layers have thicknesses in the range of 8 to 100 nanometers.

15. The thin film solar cell as in claim 12 , wherein said first layer of intrinsic semiconductor and said second layer of intrinsic semiconductor are comprised of different materials.

16. The thin film solar cell as in claim 15 , wherein said first layer of intrinsic semiconductor comprises amorphous silicon and said second layer of intrinsic semiconductor comprises microcrystalline silicon.

Assignments (2)
CORRECT RECORDATION OF ASSIGNMENT THE INCORRECT A/N 12/630,280 AND CORRECT A/N S/B 12/643,380 THE INCORRECT ATTY DOCKET NO.013627-02/US EES/NB AND CORRECT S/B 013627/ US/EES/NB - THE INCORRECT TITLE METHOD AND APPARATUS FOR PERFORMING MODEL-BASED LAYOUT CONVERSION FOR USE WITH DIPOLE ILLUMINATION AND CORRECT S/B COPPPER DELAFOSSITE TRANSPARENT P-TYPE SEMICONDUCTOR THIN FILM DEVICE. Recorded Apr 13, 2010
From: SINGH, KAUSHAI K.; NALAMASU, OMKARAM; KRISHNA, NETY M.; SNURE, MICHAEL; TIWARI, ASHUTOSH
To: APPLIED MATERIALS, INC.
Reel/Frame 024228/0006 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 26, 2010
From: SINGH, KAUSHAL K.; NALAMASU, OMKARAM; KRISHNA, NETY M.; SNURE, MICHAEL; TIWARI, ASHUTOSH
To: APPLIED MATERIALS, INC.
Reel/Frame 024148/0669 →
Continuity (2)
Provisional Application 61203336 · Dec 19, 2008
Related Publication 20100175755A1 · Jul 15, 2010