Field effect transistor gas sensor having a housing and porous catalytic material contained therein
A gas sensor for determining gas components in gas mixtures, e.g., for exhaust gases of internal combustion engines, includes a housing and a sensor element configured as a field effect transistor which has source, drain, and gate electrodes applied on a semiconductor substrate. A porous, catalytically active material is provided inside the housing of the gas sensor.
1. A gas sensor for determining gas components in a gas mixture, the gas sensor comprising:
a housing;
a gas-sensitive element that includes at least one field-effect transistor; and
a porous, catalytically active material provided inside the housing;
wherein:
the field-effect transistor includes source, drain, and gate electrodes applied to a semiconductor substrate; and
the porous, catalytically active material contains a ceramic material having a BET surface area of 20 m 2 /g to 400 m 2 /g.
2. A gas sensor for determining gas components in a gas mixture, the gas sensor comprising:
a housing;
a gas-sensitive element that includes at least one field-effect transistor; and
a porous, catalytically active material provided inside the housing;
wherein:
the field-effect transistor includes source, drain, and gate electrodes applied to a semiconductor substrate; and
a layer thickness of the porous, catalytically active material is 2 μm to 20 μm.
3. The gas sensor as recited in claim 1 , wherein the porous, catalytically active material contains a noble metal as a catalytically active component.
4. The gas sensor as recited in claim 1 , wherein the porous, catalytically active material contains one of an alkaline metal, an alkaline earth metal, or a rare earth metal as a promoter.
5. The gas sensor as recited in claim 1 , wherein the porous, catalytically active material is an oxidation catalyst.
6. The gas sensor as recited in claim 1 , further comprising:
a heating element.
7. A gas sensor for determining gas components in a gas mixture, comprising:
a housing;
a gas-sensitive element that includes at least one field-effect transistor;
a porous, catalytically active material provided inside the housing; and
a feed line for supplying the gas mixture to the gas-sensitive element;
wherein:
the field-effect transistor includes source, drain, and gate electrodes applied to a semiconductor substrate; and
the porous, catalytically active material is positioned inside the feed line as a diffusion barrier.
8. The gas sensor as recited in claim 7 , wherein the diffusion barrier is situated flat on the gate electrode and at least partially covers the gate electrode.
9. The gas sensor as recited in claim 8 , wherein the gate electrode includes one of a porous metal or a cermet layer.
10. The gas sensor as recited in claim 7 , wherein a first field-effect transistor and a second field-effect transistor are provided, the first field-effect transistor including a first porous, catalytically active material and the second field-effect transistor including a second porous, catalytically active material different from the first porous, catalytically active material in material composition.
11. A gas sensor for determining gas components in a gas mixture, comprising:
a housing;
a gas-sensitive element that includes at least one field-effect transistor; and
a porous, catalytically active material provided inside the housing;
wherein:
the field-effect transistor includes:
source, drain, and gate electrodes applied to a semiconductor substrate;
a gas-sensitive coating that is provided on the gate electrode, is made of a material different than a material of which the gate electrode is made, and is in direct physical contact with the electrode material of the gate electrode.
12. The gas sensor as recited in claim 11 , wherein at least one of the gate electrode and the gas-sensitive coating contains at least one of rhenium, ruthenium, osmium, palladium, platinum, rhodium, iridium, silver and gold.
13. The gas sensor as recited in claim 11 , wherein at least one of the gate electrode and the gas-sensitive coating includes pores having a diameter of 2 nm to 500 nm.
14. The gas sensor as recited in claim 11 , wherein a first field-effect transistor and a second field-effect transistor are provided, the first field-effect transistor including a first porous, catalytically active material and the second field-effect transistor including a second porous, catalytically active material different from the first porous, catalytically active material in material composition.