Semiconductor device and fabrication process thereof
A semiconductor device that includes a circuit portion, a first light-shielding film and plural second light-shielding films. In the circuit portion, a plurality of wiring layers that include circuit elements are laminated. The first light-shielding film covers an uppermost layer of the wiring layers and light-shields light that is illuminated at the circuit portion. The second light-shielding films are covered by the first light shielding film and formed so as to respectively encircle the wiring layers in ring forms. Outer peripheries of the plural second light-shielding films are formed to be successively smaller from an upper to a lower layer, so as to be at the inner side relative to the outer periphery of the second light-shielding film of the upper layer.
1. A semiconductor device comprising:
a circuit portion in which a plurality of wiring layers that include circuit elements are laminated;
a first light-shielding film that covers an uppermost layer of the wiring layers and light-shields light that is illuminated at the circuit portion; and
a plurality of second light-shielding films that are covered by the first light-shielding film and formed so as to respectively encircle the wiring layers in ring forms,
wherein outer peripheries of the plurality of second light-shielding films are formed to be successively smaller from an upper layer to a lower layer, so that an outer periphery of each second light-shielding film is at an inner side relative to an outer periphery of a second light-shielding film disposed at an upper layer side thereof; and wherein outer edge portions of the first light-shielding film and the second light-shielding films are curved downward.
2. The semiconductor device according to claim 1 , wherein slits are formed in the outer edge portions of the first light-shielding film and the second light-shielding films.
3. The semiconductor device according to claim 1 , wherein the wiring layers are respectively insulated therebetween by insulation films.
4. The semiconductor device according to claim 1 , further comprising a sensor portion that is formed in a vicinity of the circuit portion and receives the light.
5. The semiconductor device according to claim 1 , wherein the first light-shielding film and the second light-shielding films are formed from metal.
6. The semiconductor device according to claim 4 , wherein the sensor portion is an ultraviolet sensor that receives ultraviolet radiation, converts the ultraviolet radiation to electronic signals, and outputs the electronic signals to the circuit portion.