Semiconductor device
A method of manufacturing a semiconductor device includes providing a carrier and attaching a plurality of semiconductor chips to the carrier. The semiconductor chips have a first electrode pad on a first main face and at least a second electrode pad on a second main face opposite to the first main face, whereby the first electrode pad is electrically connected to the carrier. A plurality of first bumps are formed on the carrier, the first bumps being made of a conductive material. The carrier is then singulated into a plurality of semiconductor devices, wherein each semiconductor device includes at least one semiconductor chip and one first bump.
1. A method of manufacturing a semiconductor device, comprising:
providing a carrier;
attaching a plurality of semiconductor chips to the carrier, the semiconductor chips having a first electrode pad on a first main face and at least a second electrode pad on a second main face opposite to the first main face, whereby the first electrode pad is electrically connected to the carrier;
forming a plurality of first bumps on the carrier, the first bumps being made of a conductive material;
forming second bumps on the second electrode pads of the semiconductor chips; and
singulating the carrier into a plurality of semiconductor devices, wherein each semiconductor device comprises at least one semiconductor chip and one first bump,
wherein the height of the first bumps over the carrier is greater than the height of the second bumps over the second electrode pads.
2. The method of claim 1 , wherein the carrier has a continuous metal surface.
3. The method of claim 1 , wherein the carrier is a metal layer or a substrate coated with a continuous metal layer.
4. The method of claim 1 , wherein the carrier is planar.
5. The method of claim 1 , wherein the carrier has lateral dimensions which, in one or two dimensions, are larger than 0.2 m.
6. The method of claim 1 , further comprising attaching multiple rows of semiconductor chips to the carrier.
7. The method of claim 6 , further comprising forming multiple rows of first bumps on the carrier.
8. The method of claim 7 , further comprising distributing rows of semiconductor chips and rows of first bumps on the carrier in an alternate order.
9. The method of claim 1 , wherein forming the first bumps comprises printing the first bumps on the carrier.
10. The method of claim 1 , wherein forming the first bumps comprises printing the first bumps on the carrier and forming the second bumps comprises printing the second bumps on the electrode pads by the same printing operation.
11. The method of claim 1 , wherein the first bumps are made of a solder material.
12. The method of claim 11 , further comprising:
performing a reflow operation of the first bumps before or after singulating the carrier into a plurality of semiconductor devices.
13. The method of claim 1 , further comprising:
depositing an encapsulant over the semiconductor chip and the carrier, wherein the first bumps protrude through the encapsulant to form exposed terminals of the semiconductor device.
14. The method of claim 1 , further comprising:
depositing an encapsulant over the semiconductor chip and the carrier, wherein the second bumps protrude through the encapsulant to form exposed terminals of the semiconductor device.
15. The method of claim 1 , wherein the semiconductor chip is a vertical power diode.
16. The method of claim 1 , wherein the semiconductor chip is a vertical power transistor.
17. The method of claim 1 , wherein summits of the first bumps and the second bumps are in a plane parallel to a plane defined by the carrier.
18. A method of manufacturing a semiconductor device, comprising:
providing a carrier;
attaching a plurality of semiconductor chips to the carrier, the semiconductor chips having a first electrode pad on a first main face and at least a second electrode pad and a peripheral insulating barrier around a perimeter of the second electrode pad on a second main face opposite to the first main face, whereby the first electrode pad is electrically connected to the carrier;
forming a plurality of first bumps on the carrier, the first bumps being made of a conductive material; and
singulating the carrier into a plurality of semiconductor devices, wherein each semiconductor device comprises at least one semiconductor chip and one first bump.